Tsuyoshi Sekitani1, Makoto Takamiya2, Yoshiaki Noguchi1, Shintaro Nakano1, Yusaku Kato1,
Kazuki Hizu1, Hiroshi Kawaguchi3, Takayasu Sakurai3, and Takao Someya1*
1Quantum-Phase Electronics Center, School of Engineering, The University of Tokyo, Tokyo 113-8656, Japan
2 VLSI Design and Education Center, the University of Tokyo, Tokyo 153-8505, Japan
3Center for Collaborative Research, The University of Tokyo, Tokyo 153-8904, Japan
*
Email: someya@ap.t.u-tokyo.ac.jp, Phone: +81(Japan)-3-5841-6820, Fax: +81(Japan)-3-5841-6828
Position-sensing
coil sheet
Position-sensing
system
Organic FET
sheet
Fig. 1: Wireless power transmission sheet. (a) An image of the world’s first large-area wireless power transmission sheet embedded in the floor.
A part of the cover layer is peeling off. (b) A picture of the device assembly comprising a power transmission system driven by an 8 u 8 MEMS-
switching matrix and a position-sensing system driven by an 8 u 8 organic FET active matrix. The power transmission area is 21 u 21 cm2.
Polyimide
Cu (BL) Cu
10 mm Sensing
BL Output coil
Ag-paste
(b) Organic FET sheet
1 mm Ag
FET
G Parylene
Epoxy Au (D) Au (S)
Pentacene
Polyimide S S S
Ag (G)
D S Polyimide
Ag Ag (WL)
Pentacene AC generator : 2.95 MHz
Via Input
Fig. 2: The contactless position-sensing sheet comprising (a) position-sensing coil sheet and (b) organic FET sheet. Pictures and cross-
sectional illustrations are shown. S, D, and G represent the electrodes for source, drain, and gate, respectively. The organic FET sheet is
laminated with the position-sensing coil sheet using silver paste islands. (c) The circuit diagram of the position-sensing sheet. A resonance
frequency of 2.95 MHz is used in the position-sensing system. WL and BL represent word-line and bit-line, respectively.
Polyimide
Via Cu Cu
10 mm
Ag-paste
Transmission
Ag coil
(b) MEMS switching sheet
Polyimide
BL A Ag (to BL)
Ag MEMS switch
Via Polyimide
B
Ag
WL
Ag (to WL)
C Power generator : 13.56 MHz
5 mm Polyimide
Parylene Input Ag
Fig. 3: The power transmission sheet comprising (a) power transmission coil sheet and (b) MEMS switching sheet. Pictures and cross-
sectional illustrations are shown. A: Electrodes for electrostatic attraction connected to the word-line (WL) and bit-line (BL) of MEMS switch.
B and C: Electrodes for power transmission connected to coils and a power generator. (c) The circuit diagram of the power transmission sheet.
A frequency of 13.56 MHz is used in the power transmission system.
(a) d LR 10 M:
(b) (c)
FET
8 7
~ VGS= –60 V
LS
VGS VS d=f 6 d=f
10 4
5
d=f
5 VGS= –60 V 4
VS (V)
VS (V)
0 d = 1 mm
LR
VS (V)
0 3
VGS = 0 V
-4
2 d
-5
1
On/off ratio = 510 LS
-10 91% drop-off
-8 0
0 1 2 3 0 1 2 3 0 5 10 15 20 25
Time (Ps) Time (Ps) d (mm)
Fig. 4: Position sensing. (a) Detected voltages (VS) at gate voltage (VGS) = –60 V and 0 V, where vertical distance d between the position-
sensing coil (LS) and the receiver coil (LR) is infinite f A voltage of r 10 V at a resonance frequency (2.95 MHz) is applied to the
position-sensing cells. (b) VS at d = f and 1 mm, where VGS of –60 V is applied. VS decreases as LR approaches because of electromagnetic
coupling. (c) VS is shown as a function of d. A change in VS of 91% is attained at d = 1 mm. The dashed line represents the voltage at d = f
(a) (b) (c)
MEMS switch MEMS
switch Vop R 100
OFF 80
80
80
In air
(V)
60
Vop (V)
Voltage
40
40
60
20
R (:)
Ag-bump 00
6 40
>10
106
R (:) (:)
~~ In nitrogen
80
Resistance
ON 80 20
40
㪋㪇
40
0
4 5 6
00 103 10 10 10
50 wm 00 5
5 10
10 15
15 20
20
The number of switching cycles
Time (seconds)
Time (s)
Fig. 5: Stand-alone plastic MEMS switch. (a) Micrograph of cross-sectional surface of MEMS switch. Top electrodes for power
transmission are connected to bottom electrodes when the operation voltage (Vop) is applied to electrodes for electrostatic attraction. (b)
When a rectangular wave of Vop = 70 V is applied to the MEMS switch, the resistance changes from >106 :ҏ to 15 : ҏand the frequency
response extends up to 4 Hz. (c) MEMS switch resistance is shown as a function of the number of switching cycles.
(a) (b) (c)
B Sending power: 198 mW In shielded box
Receiver coil: LR 120 80
Received power (W) Efficiency (%)
116 mW 70
Electronic MEMS ON 62.3%
80
products (Vop= 70 V) 60
Power (mW)
40 50
Power transmission coil: LT 40
0
30 29.3 W
0.15 mW
MEMS switch MEMS OFF 20
0.1
(Vop= 0 V) 10
0 0
Power generator : 13.56 MHz 10 12 14 16 18 20 0 10 20 30 40 50
Frequency (MHz) Sending power (W)
(d) 60
(e) 60
(f)
50 LR 50 LR Twenty-one LEDs
2W
Efficiency (%)
Efficiency (%)
40 40
Z LT
30 30 X
LT
20 20
10 10
0 0
0 2 4 6 8 10 12 0 2 4 6 8 10 12
Z (mm) X (mm)
Fig. 6: Power transmission. (a) Schematic illustration of the power transmission system. (b) Power at the receiver coil (LR) is shown with
the MEMS switch operation voltage (Vop) of 70 V and 0 V. Sending power of 198 mW and frequency of 13.56 MHz are applied from the
power transmission coil (LT). (c) The power efficiency and received power are shown as functions of the sending power. The dashed line
represents the power at which the MEMS switch is broken. (d) and (e) The power efficiency is shown as a function of vertical distance Z
and horizontal distance X between LT and LR. (f) Demonstration of power transmission to a Christmas tree decorated with twenty-one light-
emitting diodes (LEDs) that require a power of 2 W. The space between the power transmission coil and the receiver coil is 5 mm.