This Page Updated: April 13, 2010

Name Major Hazards Container Disposal

Isopropanol Highly Incompatible with ABS Solvent waste.
Flammable plastic. Compatible with most Compatible with
other containers including acetone, IPA,
glass, high density methanol, PM acetate,
polyethylene (HDPE), HMDS, Remover
polypropylene (PP), nylon and 1165. (HDPE or glass
Teflon (PTFE). bottle.)
Acetone Highly Incompatible with ABS Solvent waste.
Flammable plastic, nitrile (Buna N), PVC, Compatible with
polyurethane, PVDF, and most acetone, IPA,
rubbers. Glass, metals, high methanol, PM acetate,
density polyethylene (HDPE), HMDS, Remover
polypropylene (PP), nylon and 1165. (HDPE or glass
Teflon (PTFE) are all fine. bottle.)
Methanol Highly Incompatible with ABS plastic Solvent waste.
Flammable and polyurethane. Other Compatible with
plastics (HDPE, PP, PTFE) acetone, IPA,
and glass are all fine. methanol, PM acetate,
HMDS, Remover
1165. (HDPE or glass
bottle.)
Tridecafluoro-1 1 2 Reacts with Not much information Allow to fully
2-Tetrahydroctyl-1- water to release available. Restrict to DRY evaporate away in
Trichlorosilane
(Silanizing Agent)
hydrogen glass, polypropylene, hood.
chloride gas. polyethylene, and
Corrosive. polymethylpentene containers.
Causes burns
and irritation.
Hydrofluoric Acid Extremely Attacks glass! Attacks many HF waste. NOT a
hazardous to metals and some plastics! glass bottle!! Must be
health. Both Only use high density disposed off in a high
acute and polyethylene (HDPE), Teflon density polyethylene
chronic health (PTFE), or polymethylpentene (HDPE) container!!
hazards. Can (PMP). Will slowly attack
cause death. stainless steel tweezers.
Etches glass (no
glass
containers!!!)
SU8-100, No major health Not known to attack any Solvent and
SU8-2 hazards. common containers. photoresist waste.
Sylgard 184 (Dow No major health Not known to attack any Solvent and
Corning PDMS) hazards. common containers. photoresist waste.
Potassium Will cause Not compatible with glass!! KOH waste. Use a
Hydroxide Pellets acute burns if Reacts with some metals and polyethylene or
(solid, pure)
contacts skin. polyurethane. Use stainless polypropylene
steel containers for heated container for disposal.
etching. Othwerise, use
polypropylene or polyethylene.

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This Page Updated: April 13, 2010
Name Major Hazards Container Disposal
Sulfuric Acid Acute burns to skin Use glass containers Piranha (Sulfuric/Hydrogen
and eyes. Severe for processing. Peroxide solution) waste
respiratory irritant. (glass bottle).
Can get very hot
when reacting with
water, hydrogen
peroxide, or any
base.
Hydrogen Peroxide Acute burns to skin Use glass containers Piranha (Sulfuric/Hydrogen
and eyes. for processing. High Peroxide solution) waste
density polyethylene (glass bottle) if mixed with
(HDPE) or glass is sulfuric acid.
fine for storage or
disposal. Otherwise, hydrogen
peroxide waste (HDPE
bottle).
MCC Primer 80/20 Flammable. Compatible with Solvent/photoresist waste.
(propylene glycol Vapors can be glass containers. (HDPE or glass bottle)
monomethyl ether
acetate 80%, HMDS
harmful (headache,
20%) anesthesia). Severe
skin/eye irritant.
SU-8 Developer Flammable. Compatible with Solvent/photoresist waste.
(PM-acetate, Vapors can be glass and high (HDPE or glass bottle)
propylene glycol
monomethyl ether
harmful (headache, density polyethylene
acetate) anesthesia). (HDPE) containers.
Nitric Acid Acute burns to skin Compatible with Nitric acid waste (glass
and eyes. Severe glass containers. bottle). Note: when mixed
respiratory irritant. with HF and Acetic Acid for
Can get very hot HNA etching, the resulting
when reacting with solution should be disposed
water, or any base. of in HF waste (HDPE).
Glacial Acetic Acid Acute burns to skin Compatible with Acetic acid waste (high
and eyes. Severe glass and high density polyethylene
respiratory irritant. density polyethylene (HDPE) bottle). Note:
Can get very hot (HDPE) containers. when mixed with HF and
when reacting with Nitric Acid for HNA etching,
water, or any base. the resulting solution should
be disposed of in HF waste
(HDPE).
Ultra Etch NP 13:2 Contains HF: Attacks glass! HF waste. NOT a glass
(Buffered HF Etch, a extremely Compatible with high bottle!! Must be disposed of
mix of NH3F, HF,
surfactant and water)
hazardous to density polyethylene in a high density
health! Both acute (HDPE), polyethylene (HDPE)
and chronic health polymethylpentene container!!
hazards. Can cause (PMP), and Teflon
death. Etches glass (PTFE) containers.
(no glass
containers!!!)
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This Page Updated: April 13, 2010
Name Major Hazards Container Disposal
Remover 1165. Organic Flammable. (Flash point Compatible Solvent waste.
solvent solution for 88oC). At temperatures with HDPE Compatible with acetone,
removing DQN resists.
Contains N-methyl-2-
about 80 oC, a spark or and glass. IPA, methanol, PM
pyrrolidine open flame will ignite acetate, HMDS, Remover
the fumes. 1165. (HDPE or glass
bottle.)
Contact with skin or
eyes will cause irritation
or burns. Avoid
breathing vapors.
MF CD 26 Metal Ion This is a alkaline Compatible Alkaline (base) TMAH
Free (MIF) Developer corrosive liquid. It will with HDPE developer waste. (HDPE
for Shipley and Rohm &
Haas positive DQN
case burns and irritation and glass. or glass bottle).
resists. if it contacts your skin or
eyes. Avoid breathing
Contains tetramethyl vapors.
ammonium hydroxide
(TMAH).

SPR220 Photoresist and Contact with skin or Compatible Solvent waste.

S1813 Photoresist eyes will cause irritation. with HDPE Compatible with acetone,
(Rohm & Haas).
and glass. IPA, methanol, PM
These are positive DQN Liquid is combustible (it acetate, HMDS, Remover
resists containing will burn… although it is 1165. (HDPE or glass
Diazoquinone not highly flammable). bottle.)
photosensitizer, Novolak
resin, and solvents:
ethyl lactate, anisole,
and n-amyl acetate.
Transene TFA Gold Severe respiratory Compatible Gold etch waste (Iodine
Etchant irritant. Also a severe with glass, and Potassium Iodide).
Contains Iodine
skin and eye irritant. Do HDPE, and Use glass or HDPE bottle.
(poison). not breath vapors. In Polypropylene.
case of skin or eye After 3 years, Store in base cabinet.
(Iodine Complex, exposure, flush with iodine may
Potassium Iodide and water. Wash skin with diffuse Solid trash in acid/base
Water)
soap. through HDPE trash.
and PP.
Transene Chromium May cause irritation and Compatible Chromium etch waste
Etchant 1020 burns to skin, eyes, and with glass, (Ceric Ammonium Nitrate
(Ceric Ammonium
respiratory tract. HDPE and and Nitric Acid). Use
Nitrate, Nitric Acid <6%) polypropylene. HDPE or glass bottle.

Store in acid cabinet.

Solid trash in acid/base

trash.

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This Page Updated: April 13, 2010
Name Major Hazards Container Disposal
HD-4100 Skin, eye, and respiratory Compatible Solvent and photoresist
Photodefineable tract minor irritant. Not with HDPE waste. Compatible with
Polyimide:
an unusual fire hazard. and glass. acetone, IPA, methanol,
A polyimide photoresist PM acetate, HMDS,
containing 30-60% n- Remover 1165. (HDPE or
Methylpyrrolidone and glass bottle.) Solid waste
30-60% photosensitive in photoresist/solvent
Polyimide Resin with
solvents.
waste.
PA-400R Polyimide Flammable. Vapors can Compatible Solvent and photoresist
Rinse solution: be harmful (headache, with HDPE waste. Compatible with
95-100% Propylene
anesthesia). and glass. acetone, IPA, methanol,
Glycol Monomethyl PM acetate, HMDS,
Ether Acetate (PM Remover 1165. (HDPE or
Acetate… the same glass bottle.) Solid waste
thing as SU8 Developer) in photoresist/solvent
waste.
PA-401D Polyimide Highly flammable (flash Compatible Solvent waste. Compatible
Developer: point 94oF). Severe skin, with HDPE with acetone, IPA,
>60% Cyclopentanone
eye, and respiratory and glass. methanol, PM acetate,
irritant. Can cause skin HMDS, Remover 1165.
burns, difficulty (HDPE or glass bottle.)
breathing.
A-174 Silane Adhesion Mild to moderate skin, Compatible Solvent waste. Compatible
Promoter (>98% eye, and respiratory with HDPE with acetone, IPA,
Gamma-
Methacryloxypropltri-
irritant. Combustible and glass. methanol, PM acetate,
methoxysilane) liquid, but not overly HMDS, Remover 1165.
flammable (226 oF (HDPE or glass bottle.)
flashpoint).
Micro90 Parylene Mild skin and eye Compatible If a waste bottle is needed
Microsoap irritant. Not flammable. with HDPE (unlikely) put it in it’s own
and glass. HDPE bottle and label it
MicroSoap Waste; this is a
non-hazardous waste
according to federal
hazardous waste
regulations.
Parylene C Dimer and Solid powder material. Compatible Can dispose of in general
Polymer Not hazardous. with HDPE trash. Not a hazardous
and glass. waste.

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This Page Updated: April 13, 2010
Bacteriorhodopsin (BR) Minor skin and Compatible with all Non-hazardous solid
eye irritant. plastic and glass waste (small amounts…
containers. BR should only be used
in small amounts, < 100
mL)
3-(1-pyridinio) propane Minor skin and Compatible with all Mixed solvent waste.
sulfonate (PPS) eye irritant. plastic and glass Make sure to add this
containers. name to the chemical
hazard tag, it is not on the
pre-printed tags.
Polyvinylalcohol (PVA) Minor skin and Compatible with all Mixed solvent waste.
eye irritant. plastic and glass Make sure to add this
containers. name to the chemical
hazard tag, it is not on the
pre-printed tags.
PI-2610 Polyimide Minor skin and Compatible with all Mixed solvent waste.
eye irritant. plastic and glass Make sure to add this
containers. name to the chemical
hazard tag, it is not on the
pre-printed tags.
VM-651 Adhesion Promoter Skin and eye Compatible with all Mixed solvent waste.
(for PI-2610) irritant. May plastic and glass Make sure to add this
cause burns to containers. name to the chemical
skin. Can cause hazard tag, it is not on the
permanent eye pre-printed tags.
damage.
PMMA Highly Compatible with all Mixed solvent waste.
(PolyMethylMethacrylate) – flammable. plastic and glass Make sure to add this
an ebeam photoresist
dissolved in
Extreme eye, containers. name to the chemical
Monochlorobenzene skin, and hazard tag, it is not on the
respiratory pre-printed tags.
irritant.
Inhalation can
cause central
nervous system
damage.
Aluminum Etchant Type A Contact can Avoid contact with May be combined with
(Transene) – contains cause severe metals, strong hydrofluoric acid, nitric
phosphoric acid (40-80%),
nitric acid (1-5%), acetic acid
burns. bases, and acid, and/or acetic acid
(3-20%) Moderately combustible waste. Use an HDPE or
irritating to the organics. glass bottle.
the eyes, skin, Compatible with
and mucous HDPE and glass.
membranes.
Moderately
toxic.

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This Page Updated: April 13, 2010
Carbon Nanotubes No known health Compatible Non hazardous waste.
hazards. May irritate with all
the eyes, mucous containers.
membranes, and
respiratory tract.
Copper (II) Sulfate Moderate eye and skin Compatible Copper sulfate / sulfuric
irritant and burn agent. with glass, acid waste (HDPE bottle).
Digestive and HPDE, and
respiratory tract steel.
irritation and burns.
Chronic exposure may
cause blood, liver and
kidney damage.
AZ400K Developer Severe eye irritant. Compatible Alkaline waste – mix with
Alkaline solution. with HDPE MFCD26 developer and
and glass KOH.
containers.
AZ 9200 series photoresists Eye and skin irritant. Compatible Mixed photoresist/solvent
Combustible with a with HDPE waste.
flash point of 104oF. and glass
containers.
Transene Copper Etchant Minor eye and skin Compatible Ammonium Persulfate
APS-100 (Ammonium irritant. Will with HDPE waste. DO NOT MIX
Persulfate 15-20%, Water
80-85%)
decompose to form and glass WITH ACID WASTE,
oxygen and oxides of containers. BASE WASTE, OR
sulfur and nitrogen if ORGANIC SOLVENT
heated or if mixed with WASTE.
acids or reducing
agents.
Ammonium Hydroxide Very hazardous in case Compatible Base waste. Often mixed
of skin, eye, or with HDPE with hydrogen peroxide in
respiratory contact. and glass RCA clean. Can mix waste
Skin contact produces containers. with potassium hydroxide
burns. Inhalation (KOH) and/or TMAH (in
produces severe MFCD26 developer). Do
respiratory irritation. NOT mix with acids.
Rhodamine B (water soluble Minor Compatible Rhodamine B/Stilbene
dye) eye/skin/respiratory with all 420/Silk Fibroin waste.
irritant. Not plastic and Use glass or HDPE bottle.
flammable. Not acutely glass
toxic. containers.
Stilbene 420 (water soluble Minor Compatible Rhodamine B/Stilbene
dye) eye/skin/respiratory with all 420/Silk Fibroin waste.
irritant. Not plastic and Use glass or HDPE bottle.
flammable. Not glass
acutely toxic. containers.

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This page updated June 1, 2010
Hydrochloric Acid Acute burns to skin and Compatible Hydrochloric acid waste.
eyes. Severe with glass Use an HDPE or glass
respiratory irritant. and HDPE bottle. Can mix with Nitric
Can get very hot when containers.Acid. Do NOT mix with
reacting with water, or Sulfuric Acid, any organic
any base. material, or any base.
T-9039 Polyimide Thinner Minor skin, eye, and Compatible Mixed solvent and
(Propylene Glycol respiratory irritant. with glass photoresist waste.
Monomethyl Ether (PGME)
30-60%, n-methylpyrrolidone
and HDPE.
(NMP) 30-60%)
Surpass 3000/4000 Minor skin, eye, and Compatible Mixed solvent and
Adhesion Promoter (DI water respiratory irritant. with glass photoresist waste.
95%, proprietary cationic
organic surface agent 5%)
and HDPE.
Technic Nickel Sulfamate Minor skin irritation Compatible Nickel sulfamate waste
Plating Solution (Nickel (“nickel itch”), burns to with glass (HDPE or glass bottle).
Sulfamate 20-35%, Nickel
bromide 0.5-1.5%, Boric
eyes. Carcinogenic. and HDPE.
Acid 1-3%) Not readily absorbed
through skin.
Technic Copper FB Bath Irritation and burns to Compatible Copper sulfate/sulfuric acid
Plating Solution (Sulfuric skin, severe burns to with glass waste. Can mix with
Acid 15-20%, Copper Sulfate
5-10%, Chloride ions)
eyes. Irritating to and HDPE. Technic FB copper
respiratory tract. Not brightener. HDPE bottle.
readily absorbed
through skin.
Techni Copper FB May cause slight, Compatible Copper sulfate/sulfuric acid
Brightener (proprietary temporary irritation of with glass waste. HDPE bottle.
contents)
eyes, skin and and HDPE.
respiratory tract. Not
readily absorbed
through skin.