PRIMER ON E:
Know Your Starting Point How Many Particles are There in Standard Air?
H ow Many Particles?
500,000 to 1 Million 1 Million to 10 Million 10 Million to 100 Million 100 Million to 1 Billion 1 Billion to 10 Billion 10 Billion to 100 Billion
1 Billion to 2.5 Billion 2.5 Billion to 5 Billion 5 Billion to 7.5 Billion 7.5 Billion to 10 Billion
PRIMER TWO:
Know Your End Point How Many Particles are Allowed in a Class 100 Cleanroom?
Actu ally!!!!
A Cleanroom Cleanliness Class 100 classification will allow 138,281 particles per cubic meter.
Particles are per square meter Table from Institute of Environmental Science Testing IEST standard 14644 standard
PRIMER TH REE:
How Do You Get There? We use HEPA Filters
Filter Type A B C D E F
Application Industrial, Hospitals, Food, Plastics Nuclear Facilities Laminar Flow for Semiconductors and Drug Manufacturing Semiconductors and Drug Manufacturing Hazardous Biological Containment Facilities Semiconductor
STEP ON E:
Evaluate Layout for People/Material Flow
Must take people flow into consideration. Must take process flow into consideration. Must take contamination proximity to sensitive areas into consideration. Must take facility limitations into consideration.
STEP TWO:
Determine Space Cleanliness Classification
The more sensitive the process, the lower the cleanliness classification needs to be. No more than a two order of magnitude difference between two adjoining spaces that have access to each other. IE. A class 100,000 cleanroom opening into a class 100 cleanroom is not good, but a class 100,000 cleanroom opening into a class 1,000 cleanroom is OK.
STEP FIVE:
Determine Space Air Exfiltration Flow
Primarily based upon the pressure differential between connected spaces. Need to consider process exhaust. Need to consider architectural construction.
STEP SIX:
Determine Space Air Balance
Primarily based upon the supply air plus air infiltration minus exfiltration, exhaust, and return air. Air flows may need to change to accommodate infiltration, exfiltration, and exhaust air flows. Need to track where the exfiltration air goes to and where the infiltration air comes from.
STEP SEVEN :
What variables need to be evaluated?
Temperature (66 F to 72 F) Humidity (45 % +/- 5%) Space Pressurization Cleanroom Classification Laminarity Electrostatic Discharge Requirement Noise Level Vibration
STEP EIGH T:
Determine Mechanical System to be Used
Main variable affecting mechanical system selection is cleanliness classification. Other factors affecting mechanical system selection include:
Space Availability Available funding Process Requirements Space Orientation System Air Flow Required Reliability Energy Cost Local Climate
STEP N IN E:
Perform Heating/Cooling Calculations
Use the most conservative climate conditions (99.6% heating design, 0.4% DB/MWB cooling design and 0.4% WB/MDB cooling design. Include infiltration into your calculations. Include humidifier manifold heat into calculations. Include process loads into calculations. Don t forget to include recirculation fan heat into calculations.
STEP TEN :
Fight for Mechanical Room Space
If you have a 1,000 square feet cleanroom, the approximate total facility square footage range needed for each cleanroom classification is as follows: Class 100,000 (ISO8) 1,250 SF to 1,500 SF Class 10,000 (ISO7) 1,250 SF to 1,750 SF Class 1,000 (ISO6) 1,500 SF to 2,000 SF Class 100 (ISO5) 1,750 SF to 2,500 SF
EXTRA CREDIT
Saving Energy
Cleanrooms are highly energy intensive. The primary ways to save energy is by: Reducing Air Flow Reducing Static Pressure Drop in System
0.330 0.082 0.248 0.449 0.112 0.337 0.586 0.146 0.440 0.742 0.185 0.557
Filter Media Depth 99.97% @ 0.3 Micrometers Efficiency 24 by 48 Gasketed Filter. Pressure Drops are in Inches Water Column.
Micrometers Efficiency 24 by 48 Gasketed Filter. Pressure Drops are in Inches Water Column.
Micrometers Efficiency 24 by 48 Gasketed Filter. Pressure Drops are in Inches Water Column.
Filter Frame 99.99% @ 0.3 Micrometers Efficiency 24 by 48 Filter with 2 media depth. Pressure Drops are in Inches Water Column.
Micrometers Efficiency 24 by 48 Filter with 2 media depth. Pressure Drops are in Inches Water Column.
IEST-RP-CC004
IEST-RP-CC005
IEST-RP-CC034 IEST-G-CC1001
IEST-G-CC1002
SMACNA NEBB
ISO 14644-2
ISO 14644-3
ISO 14644-3