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Process Product:

Control Plan Factory Location:

Operation Operation Responsible Reference Parameter Meas.


Module Number Name Engineer Document Name Units
Etch

© TLC, 2003
Definitions:
Name of the operation Reference document
process step or where process controls
machine Primary Engineer are defined Units
responsible for of the
design and parameter
deployment of Name of the
Operation process controls parameter(s)
number or for that operation being controlled
step Temp, time,
width, etc.
© TLC, 2003
(X/Y) Clear Requires Eng. Lines of Machine
Functional Type of Specification support for Defense Alarm Limits
CTQ* Indicator Limits? for moves? (types of control) (X Only)
Machine alarms
Machine controls, all products
Recipe/machine control
Technology control
Machine controls, all products
Recipe/machine control
Technology control
Machine alarms
Machine controls, all products
Recipe/machine control
Technology control
Machine controls
Recipe/machine control
Technology control

Engineering Upper or
Type of support is not Lower
indicator, required to alarm limits
product (Y) disposition
or process (X) or move lots
(Y/N)
*Critical to Quality. Specifications
Link parameter to are clearly
product performance. communicated Machine Alarms: operational
Answer "why are to the floor limits within the machine can run
we controlling this for disposition
parameter?" of product Machine controls/all products:
(Y/N) allows the floor to monitor and
control performance across all units
produced on each machine

Recipe/Machine control:
allows the floor to monitor recipes
per machine to determine if
additional adjustments are required
for each recipe

Technology control:
allows the Engineer to monitor
performance across all machines by
technology or recipe
Date: 2/7/2003
Control Active Control (n) Measurement
Chart Control Rules* OCAP Sample Sample Process Cpk Variation
Type* Limits (1-5) Frequency Size Sigma 1 SME

Upper or OCAP How Current


lower is defined Frequency many What Cpk One
control and of data samples is the Use standard
limits approved collection. are baseline a deviation
Type (Y/N) taken process high of
X-bar R Active Rules per standard volume measurement
X-bar s 1. One point beyond limits subgroup? deviation product error from
Individuals 2. 6 increasing or decreasing a with a gage
Delta to target 3. 8 in a row above or below CL typical the study
z 4. 2 out of 3 beyond zone A high tightest
UWMA 5. 4 out of 5 beyond zone B volume spec.
product.
Specify if using only one sided criteria
Measurement
Reference Control & Database Status
Standard OCAP (Y/N) Date Notes:

Reference Data
standard Measurement stored in
available control is used database 10/14/2008 Date to start activity
(Y/N) to monitor (Y/N) 10/14/2008 Activity Started, Date to complete activity
and control Completed
gage bias and
repeatability