Presented by
Mallikarjunachari.G (AM12D005)
email: ggmallikarjunachary@yahoo.com
Department of Applied Mechanics
21 June 2012
Outline of Presentation:
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
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Outline of Presentation:
Size
Material
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
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Modelling
Spin coating
Objective
film
Thick films
t>300nm
Thin films
100<t<300nm
Ultra thin films
t<100nm
substrate
Thin film: size reduction of
bulk material in one direction
Material 1
Material 2
Material 3
Material 4
Aluminium
substrate
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substrate
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Modelling
Spin coating
Objective
Ceramic
Metal
Eg: Al, Cu
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Polymer
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Outline of Presentation:
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
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Mallikarjunachari.G
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Modelling
Spin coating
Objective
Applications
Electronic Components
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Optical Coatings
Electronic Displays
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Outline of Presentation:
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
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Modelling
Spin coating
Objective
Dispenser
Polymer + Solvent
Substrate
Top view
Isometric view
Spin 150
Single substrate spin processor
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Outline of Presentation:
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
1
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Mallikarjunachari.G
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Modelling
Spin coating
Objective
>0
Spin up
= 0
Spin off
Solvent
Evaporation
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Modelling
Spin coating
Objective
Film
Thickness
Film
Thickness
Spin Speed
Spin Time
Film
Thickness
Thickness
Uniformity
Exhaust
Volume
Exhaust
Volume
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Modelling
Spin coating
Objective
Objective:
Adhesion: A challenge for concrete repair
Cement adhesive
interface
Cement
Substrate
Clay
Polymer
Coating Material
Water
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Outline of Presentation:
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
1
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Mallikarjunachari.G
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Advantages &
Disadvantages
Applications
Conclusions
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Advantages &
Disadvantages
Applications
Dispenser
Polymer
Substrate
Top view
Front view
Spin 150
Single substrate spin processor
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Dispenser
Polymer
Substrate
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Outline of Presentation:
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Applications
Advantages:
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7
25
8
26
9
27
10
28
11
29
12
30
13
31
14
32
15
33
Date:
16
34
17
35
18
36
19
37
20
38
40/20
39
40