Aplicaciones con

ANSYS
Presenta:
Moiss Vzquez Toledo
26 agosto del 2013, Silao, Gto Clase muestra
Contenido
Introduccin
o Interfaz de ANSYS
Modelado con ANSYS
o Anlisis Modal
o Anlisis Harmnico
o Anlisis Estructural
Modelos Analticos
o Anlisis Modal
o Anlisis Harmnico
o Anlisis Estructural
Resultados
Conclusin

Clase muestra 26 agosto del 2013, Silao, Gto
Introduccin
Clase muestra 26 agosto del 2013, Silao, Gto
Introduccin
Clase muestra 26 agosto del 2013, Silao, Gto
Preprocessing
Solution
Postprocessing
Interfaz de ANSYS
Modelado con ANSYS
Clase muestra 26 agosto del 2013, Silao, Gto
Analizar el comportamiento dinmico de un micro-
cantilevers, este microresonador es el componente
mecnico de un sensor basado en tecnologa MEMS.

Geometra
500 28 5
Propiedades de Silicio
= 169.8
= 0.066
= 2330 .
3








Modelado con ANSYS
Clase muestra 26 agosto del 2013, Silao, Gto
Anlisis Modal

Numerical Model
o Natural frequency




May 14 , 2013, Albuquerque, NM Department of Mechanical Engineering
| |{ } | |{ } | |{ } ( ) { } t F u K u C u M = + +

| |{ } | |{ } { } 0 = + u K u M

) sin( t U u e =
| | | | ( ){ } { } 0
2
= u M K e
Sensor design
(17)
(18)
(19)
o Harmonic Solution
May 14 , 2013, Albuquerque, NM Department of Mechanical Engineering
} { { } } { } {
} { { } } { } {
t i t i i
t i t i i
e u i u e e u u
e F i F e e F F
e e |
e e
) (
) (
2 1 max
2 1 max
+ = =
+ = =
| | | | | | } { } { { } { }) ( ) )( (
2 1 2 1
2
F i F u i u K C i M + = + + + e e
Sensor design
(20)
(21)
Introduction
MEMS technology can allow the development of
magnetic field sensors.

Advantages:
o Small size
o Low power consumption
o High resolution
o Fast response
o Minimum cost


May 14 2013, Albuquerque, NM Department of Mechanical Engineering
Fig. 1. Sensor applications. [1]
[1] http://www.diarioelectronicohoy.com/sensor-de-movimiento-mems/
Introduction
Application

May 14 2013, Albuquerque, NM Department of Mechanical Engineering
a) b)
Fig. 2. a) Schematic diagram of the size and speed measure of vehicle , b) Future medical application of magnetic
field sensor for visualing magnetically market diagnostic capsule [2]

[2] Herrera-May AL, Aguilera-Cortes LA. Garca-Ramirez PJ. Resonant Magnetic Field Sensors Based On MEMS Technology. Sensors. 2009; 9(10): 7785-7813. doi:
10.3390/s91007785.
Introduction
Application

May 14 2013, Albuquerque, NM Department of Mechanical Engineering
a)
Fig. 3. a) Schematic vies of an inspection platform of oil pipeline wall that consiste of a rotating permanent magnetic
exciter and an array of magnetic field microsensor[3], b) Effect on the vehicle stability achieved with an ESP system


[3] Herrera-May AL, Aguilera-Corts LA, Garca-Ramrez PJ, Nelly B. Mota-Carrillo, Wendy Y, Padrn-Hernndez, Figueras E. Development of Resonant Magnetic Field
Microsensors: Challenges and Future Applications. Microsensors. India: INTECH; 2011: 65-84. ISBN 978-953-307-170-1.

Sensor design
SUMMit V process

May 14 2013, Albuquerque, NM Department of Mechanical Engineering


Fig. 4. SUMMit V fabrication process.
Sensor design
Structural configuration

May 14 2013, Albuquerque, NM Department of Mechanical Engineering


Fig. 5. Main dimensions of MEMS sensor.
26
2
8

2

150
2
0
0

466
3
0

30
1
0
0

100
2
Sensor design
Principle operation

May 14 2013, Albuquerque, NM Department of Mechanical Engineering


Fig. 6. Operation principle of the MEMS sensor.
Sensor design
Principle operation

May 14 2013, Albuquerque, NM Department of Mechanical Engineering


Fig. 7. Schematics of the signal conditiong system
for the magnetics field sensor. [2]

B
y
Magnetic field
densities
VCSEL

Phototransistor
PIC
L
C
D
Regulator 2
Electronic
oscillator

Current
source

Regulator 1

Battery
Sensor design
Analytical Model
o Natural frequency

May 14 2013, Albuquerque, NM Department of Mechanical Engineering


(05)
(06)
(07)
(08)
Sensor design
Analytical Model
o Damping Models


Viscous damping




May 14 2013, Albuquerque, NM Department of Mechanical Engineering


(09)
(10)
(11)
(12)
Sensor design
Analytical Model
Support Loss


Thermoelastic damping





May 14 2013, Albuquerque, NM Department of Mechanical Engineering


(13)
(14)
(15)

1
=

3
sinh + sin
cosh + cos

=

=
1
2

(16)
Numerical Model
o Natural frequency




May 14 , 2013, Albuquerque, NM Department of Mechanical Engineering
| |{ } | |{ } | |{ } ( ) { } t F u K u C u M = + +

| |{ } | |{ } { } 0 = + u K u M

) sin( t U u e =
| | | | ( ){ } { } 0
2
= u M K e
Sensor design
(17)
(18)
(19)
o Harmonic Solution
May 14 , 2013, Albuquerque, NM Department of Mechanical Engineering
} { { } } { } {
} { { } } { } {
t i t i i
t i t i i
e u i u e e u u
e F i F e e F F
e e |
e e
) (
) (
2 1 max
2 1 max
+ = =
+ = =
| | | | | | } { } { { } { }) ( ) )( (
2 1 2 1
2
F i F u i u K C i M + = + + + e e
Sensor design
(20)
(21)
Sensor design
Numerical Model





May 14 2013, Albuquerque, NM Department of Mechanical Engineering


Fig. 8. Element type
Result
May 14 2013, Albuquerque, NM Department of Mechanical Engineering


Fig. 8. Initial displacement (Joule effect).
Data Value
Current (mA) 1
Voltage (mV) 5.03
Electrical
Resistecial ()
5.03
Initial
Deformation (nm)
8.46
Result
May 14 2013, Albuquerque, NM Department of Mechanical Engineering


10.66 %
Models
Frequenc
y (kHz)
Numeric 48.326
Analytic 54.094
Fig. 8. Modal analysis
Result






May 14 2013, Albuquerque, NM Department of Mechanical Engineering
Fig. Linear respounse.
0
1
2
3
4
5
6
7
8
100 600 1100 1600 2100 2600
D
i
s
p
l
a
c
e
m
e
n
t

(

m
)

Magnetic Field (mT)
Displace
0
1
2
3
4
5
6
7
8
32,320 37,120 41,920 46,720 51,520
O
u
t
p
u
t

D
i
s
p
l
a
c
e
m
e
n
t

(

m
)

Frequency (kHz)
1000 mT
2000 mT
3000 mT
Fig. 8. Maxima displacement in resonans respons.
Atmospheric pressure
Result






May 14 2013, Albuquerque, NM Department of Mechanical Engineering
Pressure work 10 Pa

Pressure
(Pa)
Resolutio
n (T)
Power
consumption
(W)
101 325 3000 5.03
10 117 5.03
Result






May 14 2013, Albuquerque, NM Department of Mechanical Engineering
0
20
40
60
80
100
120
32,320 37,120 41,920 46,720 51,520
O
p
e
r
a
t
i
o
n

S
t
r
e
s
s

(
M
P
a
)


Frequency (Hz)
Principal Stress
1000 105.872
= 9.4

= 1000

= 0.5

()
500 105.872
=4.7
Conclusions
May 14 2013, Albuquerque, NM Department of Mechanical Engineering
The sensor consists of two u-shaped beams. These beams
are orthogonally joined between them.
This sensor can work for both atmospheric pressure and
10 Pa pressure, respectively.
This sensor has a simple optical sensing system.
The FEM and analytical models were made to resonanse
frequency of the sensor.
This sensor presented a linear response for cases studied.

Acknowledgments
May 14 , 2013, Albuquerque, NM Department of Mechanical Engineering