Coventor Tutorial

Bi-Stable Mechanical Beam Simulation

-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Kyoto University

Coventor-Process : Material Deification

Change the electric conductivity
of Silicon since it was doped.

For detailed information on Material Deification, please

refer to the Section 2.3 of the manual Designer ! ! !

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Kyoto University

Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology

Kyoto University

Coventor-Process : Create Substrate

For detailed information on editing process, please refer to the

Section 2.4 of the manual Designer ! ! !
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Coventor-Process : Oxide Formation

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Coventor-Process : Si Formation

Only this Si layer for simulation: Accurate Thickness!!

Si layer for layout: Accurate Layer Name!!

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Coventor-Process : Si Patterning

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Coventor-Process : Metal Formation

Metal layer for layout: Accurate Layer Name!!

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Coventor-Process : Metal Patterning

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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology

Kyoto University

Coventor Create Layout

For detailed information

on editing layout, please
refer to the Section 2.5
& 3.2.1 of the manual
Designer! ! !
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Kyoto University

Coventor Check Layers

The layer names are from the predefined Layer Names in the last
Process Editor!!

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Coventor Edit Your Layout

Edit by input
co-ordinate
Standard
drawing tools

Other useful
functions

For detailed information on editing layout, please refer to the

Section 2.5 & 3 of the manual Designer ! ! !
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Coventor Edit Your Layout

For
Bended
beam:
The beam and
anchor should
be merged.
How?
Select beam
and anchor
and then
using
boolean>Or for
merge.

Otherwise, solid
model cant be
built!!

ERROR
For detailed information on editing layout, please refer to the
Section 2.5 & 3 of the manual Designer ! ! !

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Kyoto University

Coventor Finish Layout

Two Layers:
SILICON!!
METAL!!

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Coventor Finish Layout

The layout should contains
TWO Layers with the names
of SILICON &
METAL!!

The final cell name should

be top cell_Group
number, e.g., top
cell_6a and top cell_6b.

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Coventor Flat Hierarchy

Before
exporting the
layout to top
cell, the top
cell should be
flattened.

For detailed information on editing layout, please refer to the

Section 2.5.7 of the manual Designer ! ! !
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Coventor Gds Out

Chose a file to
output the layout.

For detailed information on editing layout, please refer to the

Section 2.6.6 of the manual Designer ! ! !
Hong Kong University of Science and Technology

Kyoto University

Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology

Kyoto University

Coventor Initial Solid Model

The SILICON is
a whole bulk
material!

Since only
SILICON layer is
simulated, other
can be hided.

For detailed information on solid model, please refer to the

Section 4.5 of the manual Designer ! ! !
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Coventor Partition
Partition the Si
into several parts.
(Partition the beam
(moved parts)
from the anchor
(fixed parts) .
1. Choose 3 points to
generate a plane
2. Choose the plane
and the Silicon
bulk (needed for
partition)
3. Partition under
Solid Model
For detailed information on solid model, please refer to the
Section 4.5.1 of the manual Designer ! ! !
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Coventor Partition (After)

After partition,
one Silicon bulk
is cut into two
parts.

Finally, the one

Silicon bulk will
be cut into many
parts.

After partition,
the plane can be
hided.
After several
times of partition,
the beams will be
completely
separated from
the anchor.

For detailed information on solid model, please refer to the

Section 4.5.1 of the manual Designer ! ! !
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Coventor Add Layer to Mesh Model

Select ALL
Silicon parts and
add them to Mesh
Model

For detailed information on solid model, please refer to the

Section 4.7 of the manual Designer ! ! !
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Coventor Add Layer to Mesh Model

ALL Silicon parts
move into Mesh
Model

For detailed information on Mesh model, please refer to the

Section 4.7 of the manual Designer ! ! !
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Coventor Meshing Settings

For detailed information on Mesh model, please refer to

the Section 4.7 of the manual Designer ! ! !
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Coventor Generate Meshing

Select ALL
Silicon parts
and
Generate
Mesh.

For detailed information on Mesh model, please refer to the

Section 4.7 of the manual Designer ! ! !
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Coventor Finish Meshing

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Coventor Naming Entities

Name
electrodes on
the top faces!
Potential
will be
applied on
these faces.
For detailed information on Mesh model, please refer to the
Section 4.6 of the manual Designer ! ! !
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Coventor Naming Entities

Name anchors on
the bottom faces!
Fixall and
Temperature
will be applied
on these faces.

For detailed information on Mesh model, please refer to the

Section 4.6 of the manual Designer ! ! !
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Coventor Naming Entities

Name the front faces or

other needed faces of the
actuator, amplifier or
bistable beam on the side
faces!
Pressure or
Displacement will be
applied on these faces
For detailed information on Mesh model, please refer to the
Section 4.6 of the manual Designer ! ! !
Hong Kong University of Science and Technology

Kyoto University

Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Kyoto University

Coventor Solver Setting

Choose the 2nd solver

Choose your mesh model

& then Set the solver

For detailed information on editing layout, please refer to the Section 3.5
of
the manual analyzer_standard ! ! !
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Coventor Solver Setting

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Coventor Surface Boundary conditions

Example: apply voltage to actuator to analysis the temperature, displacement, stress

and so on.
1.Fixall for anchor
2.Set the temperate of all anchor as room temperature (300K). The units is K.
3.Apply voltage to electrodes. The units is voltage.

For detailed information on setting boundary

conditions, please refer to the Section 3.5.3
of the manual
analyzer_standard ! ! !

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Coventor Surface Boundary conditions

For other simulations:

1.Fixall and Temperature are always applied on anchor faces.
2.Potential can be applied on electrode faces.
3.Pressure or Displacement can be applied on side faces

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Coventor SBCs for Bistable Beam

For detailed information on Simulation methodology of Bistable Beam, please refer to

the Tutorial on simiulation of bistable beam ! ! !

Apply one Displacement to get one Force

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Coventor Displacement-Force Simulation

For simulation, one can not solve an
arbitrary displacement directly, according
to my experience. Instead, one need to
increase the displacement bit by bit from
zero, and telling Coventor to start the
analysis from the result of the previous one.
In this manner, the simulation will not fail
easily, because defining the displacement
resolves the large non-linearity of buckling.
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Coventor One or Multi Point Simulation

1. Correspond the displacement to a variable,
mechBC1, based on MemMech Solver.

4. Set
the
value

3. Set the Trajectory

6. Run here for

simulating one value

3. Correspond the mechBC1 to a Trajectory

2. Start to
set Variable
5. Run here for simulating a series of values
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Coventor Contact Boundary Conditions

Plan: ACT CON

Plan: AMP CON2

If you want to use the

actuator to push the
amplifier,
or use the amplifier to
push the beam
you need to define the
Planes of actuator,
amplifier and beam as
contact planes.

Plan: BEAM CON

Plan: AMP CON1
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Otherwise, they
actuator will move
across the amplifier, or
the amplifier will move
across the beam rather
than push it.
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Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology

Kyoto University

Coventor Simulation

Real-time
Simulation
Progress/health
Monitoring
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Coventor View Resluts

For detailed information on Visualizer, please refer to the Section 9 of

the manual analyzer_standard ! ! !
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Coventor 3D Result Viewing

For detailed information on Visualizer, please refer to the Section 9 &

9.1 of the manual analyzer_standard ! ! !
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Coventor Simulation Result of the

Displace-Fore of Bistable Beam
Checking the
displacement
deformation using
Geometry Scaling

For detailed information on Visualizer, please refer to the Section 9 &

9.4 of the manual analyzer_standard ! ! !
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Coventor Simulation Result of the

Displace-Fore of Bistable Beam
Checking the Force Value
using Table rxnForces.

Sign of rxnForces changes

from + to or to +,
indicating two stable states.
For detailed information on Visualizer, please refer to the Section 9 &
9.4 of the manual analyzer_standard ! ! !
Hong Kong University of Science and Technology

Kyoto University