Microsystems in measurements of
mechanical quantities- displacement,
velocity and acceleration
Mechanical quantities important in measurements with sensors:
x(t), (t), = x/x , - position (linear, angular), displacement, elongation (strain)
v = dx/dt, = d/dt, a = dv/dt velocity, acceleration (linear, angular)
F = ma, = dF/dA, M = F d - force, pressure, torque
dm/dt, dV/dt - mass flow, volume flow
For quantities varying in time we measure:
t
1
A A(t )dt
t0
average values
rms values
2
rms
1
2
A(t ) dt
t0
x ( t ) v ( t )dt C2
Bearing in mind determination of integration constants, it is necessary to do
additional measurements.
Recent MST technologies allow to fabricate low cost but precise acceleration
sensors.
Accelerometers, regardless of the conversion technique, require the existence
of a seismic mass, which displacement with respect to the housing is
rgistered. Taking into account the conversion technique of a displacement,
one deals with different kinds of accelerometers: piezoelectric, piezoresistive,
capacitive, thermal.
2
y 2
2
dt
m dt m
dt
1. m large
b small
k small
2.
Sensor case moves relative to
the Earth along a coordinate x
m small
b large
k small
3. m small
b small
k large
y x
position sensor
b
dx
y
m
dt
velocity sensor
k
d2x
y 2
m
dt
accelerometer
In reality the sensor mass should be small enough to avoid influence on the investigated
object. In this case one can build a sensitive accelerometer and other3vibration
parameters can be obtained by integration of acceleration.
Piezoelectric accelerometer
Piezoelectric plates are sandwiched between the casing and the seismic mass, which
exerts on them a force proportional to acceleration.
1. seismic mass
2. piezoelectric plates (with magnification)
3. tension control
4. FET preamplifier
5. cable attachment
Piezoelectric effect
Applying a force to the plate along the electrical axis one generates the
charge on the surfaces, to which a stress is applied (longitudinal piezoelectric
effect).
Acting with a force along mechanical axis y we induce a charge on the
surfaces as before (transversal effect).
x1
x1
Longitudinal effect
Transversal effect
dq
d
kp
dt
dt
kp piezoelectric module
(for quartz 2.2 10-12 C/N, for ferroelectrics ca.100 times higher)
For the longitudinal effect (force Fx) one obtains for surface Ax a charge
Q = Axq = Axkp = kpFx
- independent of Ax
G conductance
Capacitive sensor
C
C
Sensitivity
dC/dl = - 0rA/ l2 , changes with l
dC/C = - dl/l , high relative sensitivity
for small l (nonlinearity)
0,1
l
l
Differential capacitor
C = C2 C1 = 0r A2l/(l2 l2)
for l << l
C = 0rA2l/l2, hence
C/C = 2l/l
C1
l
l
l
C2
-0,6
0,6
l
l
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Capacitive
displacement sensor
The displacement causes moving of the shaft and is calculated from the ratio
of capacitances
CWR/CWS
In practice the S electrode needed carefull screening to avoid the inflence of
air humidity variations on CWS capacitance
(change in configuration of the electric field).
11
C C 0 C
12
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Capacitive accelerometer
From discussion of the mechanical model of vibration sensor it follows that
for the system with high spring konstant k we can cosider the deflection,
i.e. also the change in capacitance, as proportional to the acceleration.
In this case one obtains a capacitive accelerometer.
The movable mass is sandwiched between upper and base fixed electrodes
forming two variable capacitances.
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