Lauren Crane
Applied Materials
Rev 1
S2 Time Line
1991 – The first version is published as “S2-93”. With this increased profile,
and subsequent official impact, opportunities for improvement are
quickly identified an revision work begins again.
2 – Scope
Equipment used to manufacturer, measure, assemble, and test semiconductor
products
3 – Limitations
Doesn’t cover all possible EHS design criteria
Not intended to verify compliance with local regulatory requirements
4 – Reference Standards
Both normative and informative standards are referenced
AC & DC
20 with accessible main disconnect if there
are only electrical hazards
OK
10 Exception - EMO, safety device, data
logging equipment circuits under
8 16 24 32 60 68
certain conditions
voltage Hazardous AC
▪ No intended bypass
▪ Provide instructions for connecting to any
EMO interface ports
▪ Electromechanical systems are preferred –
can be FECS or solid state with extra testing
▪ Actuators no more than 10 ft of travel from
operation and maintenance positions
10 Jan 1, 2006 Event, Venue information
S2 Section 13 – Electrical Design
▪ Limit the need for work w/ live hazardous potentials
Supplemental control
Primary Control
Secondary Control
▪ Exhaust systems
should be assessed
per Appendix 2 and
SEMI S6.
▪ Provide exhaust
interlocks for equipment
handling HPM’s
▪ Design exhaust interlock alarms
to be capable of interfacing with
the user facility.
▪ Per Appendix 2 exhaust for a gas box
must dilute flammables below 25% of LEL
▪ Optimize exhaust flow. Target pressure: -0.1 in. H2O
(-1.0 in H2O for pump exhaust)
20 Jan 1, 2006 Event, Venue information
S2 Section 23 – Chemicals
▪ Create an inventory of chemicals and identify them
as HPM or ODOROUS or IRRITANT
▪ Perform a hazard analysis which addresses potential
Mixing of incompatibles
Routine emissions
Maintenance emissions Ref
Failure points (e.g., fittings, pumps) Appendix 3
▪ 20% of the
Power Density ▪ 20% of the IEEE
1nm IR 0.3 – 300 GHz C95.1-1991 values
-700nm - ACGIH values for
400nm Irradiance and
Radiance (1996) 400nm
UV
▪ Direct values
180nm for Irradiance
23 Jan 1, 2006 Event, Venue information
S2 Section 26 – Lasers
▪ Design the equipment to be no greater than laser class 2
(higher class lasers may be incorporated)
360°
1m 3.5 m
▪ Limits: 80 dBA continuous
120 dB impulse
1.5 m 1.2 m
Ambient