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Physical Vapor

Deposition
PVD
 Physical methods produce the atoms that
deposit on the substrate
– Evaporation
– Sputtering
 Sometimes called vacuum deposition
because the process is usually done in an
evacuated chamber
 PVD is used for metals.
 Dielectrics can be deposited using specialized
equipment
Salicide

http://www.research.ibm.com/journal/rd/444/jordansweet.html