• Dapat mengidentifikasi:
a. Struktur kristal
b. Tekstur
c. Amorphous material
d. Cacat
e. Karakterisasi polymorphs
X-Ray Diffraction
(XRD)
Bragg’s Law
𝑛𝜆 = 2𝑑𝑠𝑖𝑛𝜃
N : indeks bias
𝜆 : Panjang
gelombang
d : jarak antar
planar
X-Ray Diffraction (XRD)
Stylus
Profilometry
Source:
https://www.iitk.ac.in/dord/data/care_funding/2008-
09/Monica_Katiyar.pdf
Surface Profilometer
Definition:
A profilometer is a measuring instrument used to measure a surface's
profile, in order to quantify its roughness computed from the surface
topography.
Critical dimensions as
• step,
• curvature,
• flatness
Surface Profilometer