TUGAS RESEARCH BASED LEARNING

KARAKTERISASI SIFAT OPTIK SUATU MATERIAL DENGAN

SPEKTROFOTOMETER UV-VIS

Disusun Oleh:
Ardika Satria 11116084

PROGRAM STUDI FISIKA

JURUSAN SAINS
INSTITUT TEKNOLOGI SUMATERA
2018
 Daftar Isi
1. Pendahuluan ................................................................................................................................... 3
2. Teori Dasar ...................................................................................................................................... 3
3. Metodologi Percobaan.................................................................................................................... 4
3.1 Alat dan Bahan ........................................................................................................................ 4
3.2 Langkah Percobaan ................................................................................................................. 4
4. Hasil dan Pembahasan .................................................................................................................... 5
5. Kesimpulan...................................................................................................................................... 6
Daftar Pustaka......................................................................................................................................... 7
Lampiran 1. Data perhitungan pada masing-masing konsentrasi .......................................................... 8
Lampiran 2. Perhitungan Indeks dan Ketebalan Lapisan ...................................................................... 27
 1. Pendahuluan
Hasil penilitian pada bidang material terus meningkat, khususnya pada bidang material
tipis. Perkembangan teknologi dan industri pada nanomaterial juga menjadi salah satu
pengaruh besar dalam penilitian bidang material tipis. Pada material tipis memiliki banyak
kegunaan diantaranya sebagai pelindung maupun sebagai lapisan daya hantar pada material
lain. Material tipis tersebut seringkali digunakan sebagai substrat tipis untuk melapisi logam
maupun senyawa lainnnya, contohnya semikonduktor. Beberapa substrat tersebut dapat
menyerap sinar yang tinggi yang ditandai dengan nilai energi celah pita (optical bandgap) yang
relatif besar, stabil terhadap cahaya dan keberadaannya melimpah di alam1. Selain itu,
kombinasi material dengan menggabungkan substrat satu dengan yang lainnya yang memiliki
nilai sifat optikal yang berbeda dapat meningkatkan fungsi kerja dari material fotokatalis.

Pada pembahasan tugas Research Based Learning (RBL) berikut sifat optik dari suatu
material ditentukan dengan pengamatan spectrum transmitansi yang diperoleh dari analalisis
alat spektrofotometer UV-Vis. Tujuan RBL ini adalah untuk menkarakterisasikan sifat optikal
dari suatu material dan mengetahui harga optical bandgap (energi celah optik) material
tersebut. Termasuk dalam kategori bagaimana material dengan harga optical bandgap nya jika
sudah diketahui.

2. Teori Dasar
Karakterisasi sifat optik dilakukan dengan menggunakan spektrometer UV-Vis, di
mana jika cahaya dilewatkan pada suatu material maka sebagian cahaya tersebut dipantulkan
(reflected), dihamburkan (scattered), diserap (absorbted) dan sebagian diteruskan (transmitted).
Pada prinsipnya spektrometer UV-Vis ini adalah membandingkan cuplikan dan standar, dalam
hal ini yang digunakan sebagai standar adalah kaca preparat 2. Dari spektrum yang didapat
menunjukkan hubungan antara transmitansi dengan panjang gelombang (𝜆), kemudian tebal
dari lapisan tipis dihitung dengan pendekatan persamaan :

1
𝑑= (1)
1 1
2𝑛1 ( − )
𝜆1 𝜆2

1
Aeni, Nur, P.L. Gareso, Eko Juarlin. Karakteristik Sifat Optik dan Struktur Kristal Lapisan Tipis Bilayer ZnO/TiO 2
dengan Metode Spin Coating. Makassar : Universitas Hassanudin. 2014. Hal 2
2
Siswanto, Bambang. Wirjoardi, Tri Mardji Atmono, Yunanto. Karakterisasi Sifat Optik Lapisan Tipis a-Si:H:B
Untuk Bahan Sel Surya. Yogyakarta : Puslitbang Teknologi Maju Batan.2006. Hal 3.

3
dengan d (m) adalah tebal lapisan tipis, 𝜆1 (m) dan 𝜆2 madalah pajang gelombang pada
puncak spektrum pertama dan kedua, sedangkan n1 adalah indek bias lapisan yang dirumuskan
dengan persamaan :

(1 + 𝑛0 ) + √(1 + 𝑛0 )2 − 4𝑛0 𝑇0
𝑛1 = (2)
2√𝑇0

dengan no adalah indeks bias kaca (1,5) dan To adalah transmitansi minimum (%).

Untuk menentukan lebar celah optik digunakan metode Touc-plot yang dituliskan
hubungan antara koefisien absorpsi dengan energi foton dengan persamaan:

√𝛼ℎ𝜐 = 𝐴(ℎ𝜐 − 𝐸𝑜𝑝𝑡𝑖𝑐 ) (3)

𝑐
Dengan h adalah konstanta Planck, 𝜐 = 𝜆 , A adalah konstanta tergantung material dan 𝐸𝑜𝑝𝑡𝑖𝑐

adalah celah energi (eV) serta koefisien absorbansi 𝛼 (m-1) dapat di tentukan melalui persamaan
:

ln 𝑇
𝛼= (4)
𝑑

Dengan T adalah nilai transmissi optik (%). Sehingga dari grafik a hn terhadap hn dapat
diperoleh Optical bandgap (𝐸𝑜𝑝𝑡𝑖𝑐 ) dari perpotongannya dengan sumbu hn .

3. Metodologi Percobaan
3.1 Alat dan Bahan
Bahan yang digunakan dalam percobaan ini adalah sampel material yang tidak
diketahui dan sudah melalui proses sebelumnya agar siap untuk di analisis dengan alat
spektrofotometer UV-Vis. Sampel dibagi dalam 5 konsentrasi yaitu masing-masing, 1 sccm;
1.5 sccm; 1.8 sccm; 2.5 sccm; dan 3.5 sccm.

3.2 Langkah Percobaan

Percobaan ini dilakukan dalam beberapa tahap yaitu :

1. Pengukuran dengan alat spektrofotometer UV-Vis

2. Perhitungan dan analisa grafik
3. Penentuan jenis material

4
 4. Hasil dan Pembahasan

100
90
80
Transmittance (%)

70
60
50
40
1.0 sccm
30
1.5 sccm
20 1.8 sccm
2.5 sccm
10 3.5 sccm
0
500 600 700 800 900 1000 1100
Wavelength (nm)

Gambar 1 Grafik Hasil Analisis Spektrofotometer UV-Vis

Grafik diatas menunjukkan hasil pengukuran transmitansi sampel terhadap panjang

gelombang dengan masing masing konsentrasi 1.0 sccm; 1.5 sccm; 1.8 sccm; 2.5 sccm; dan
3.5 sccm. Pengukuran yang diperoleh dari alat spektrofotometer UV-Vis dengan panjang
gelombang 300 nm - 800 nm. Pada masing-masing sampel akan meneruskan cahaya 10-68%,
9.8-74 %, 32-82%, 31-86%, dan 11-75%. Dari hasil yang didapatkan terlihat bahwa setiap
penambahan konsentrasi menjadi lebih tinggi, menyebabkan terjadinya pergeseran pada daerah
penyerapan sehingga ini berpengaruh pada pita-energi yang dihasilkan.

Untuk menentukan ketebalan sampel digunakan persamaan 1, sehingga ketebalannya

adalah 1.908𝑥10−5 𝑚 yang di evaluasi dari bagian data linear secara empirik dan didefinisikan
dalam lingkup Touc Plot dan diperoleh lebar celah energi. Hasil yang di tunjukkan nilai celah
energi yang meningkat. Sedangkan indeks bias yang di hitung dengan persamaan 3, hasil yang
didapatkan dari perhitungan rata-rata indeks bias adalah 3.55. Gambar 2 menunjukkan grafik
nilai pita energi pada masing masing sampel 1.0 sccm; 1.5 sccm; 1.8 sccm; 2.5 sccm dan 3.5
sccm yaitu 1.271 eV, 1.277 eV, 1.228 eV, 1.347 eV, dan 1.348 eV. Grafik tersebut diperoleh
dari perhitungan pada software Microsoft Excel 2016. Nilai pita energi yang paling kecil
diperoleh pada konsentrasi 1 sccm. Sedangkan pada konsentrasi 2.5 sccm dan 3.5 sccm hampir
tidak terjadi perubahan sehingga nilai pita energi nya adalah 1.35 eV.

5
 0.000014

0.000012 1.0 sccm

1.5 sccm
(αhv)^1/2 (m^-1/2 eV^1/2

0.00001
1.8 sccm
0.000008
2.5 sccm
0.000006 3.5 sccm
Linear (1.0 sccm)
0.000004
Linear (1.5 sccm)
0.000002 Linear (1.8 sccm)

0 Linear (2.5 sccm)

1 1.2 1.4 1.6 1.8 2 2.2 Linear (3.5 sccm)
-0.000002
hv (eV)

Gambar 2 Plot √𝛼ℎ𝑣 terhadap hv

Nilai pita energi ditentukan dengan mengektrapolasi bagian linear dari kurva ke sumbu
energi. Perubahan pita energi kemungkinan disebabkan oleh perbedaan ukuran dari ukuran
partikel yang dipengaruhi oleh penambahan konsentrasi. Pita energi dengan nilai 1.34 eV pada
suhu 300K adalah senyawa Indium Phosphide (InP). Senyawa ini merupakan semikonduktor
biner yang terdiri dari indium dan fosofor, identik dengan struktur GaAs dan bagian dari
semikonduktor II-V. Senyawa ini juga biasanya digunakan dalam optoelektronik. Dugaan ini
diperkuat dengan indeks bias dari senyawa ini adalah 3.55.

5. Kesimpulan
Dari keseluruhan percobaan diatas didapat bahwa:

1. Ketebalan rata-rata yang diperoleh secara linear dari analisis UV-Vis pada material
tersebut adalah 1.908 𝑥10−5 𝑚.
2. Indeks bias juga didapatkan dari hasil perhitungan yang kemudian di rata-ratakan
adalah 3.55.
3. Pada masing-masing konsetrasi 1.0 sccm, 1.5 sccm, 2.5 sccm, dan 3.5 sccm didapat
energy celah opti atau pita energy yang diperoleh dengan ektrapolasi bagian linear
kurva berturut-turut adalah 1.271 eV, 1.277 eV, 1.347 eV, dan 1.348 eV.
4. Indium Phosphide (InP) memiliki nilai energy celah optik 1.34 eV dan indeks bias 3.55.
Dari hasil percobaan di atas ditentukan bahwa material tersebut merupakan senyawa
InP, termasuk material semikonduktor.

6
Daftar Pustaka

Aeni, Nur, P.L. Gareso, Eko Juarlin. Karakteristik Sifat Optik dan Struktur Kristal Lapisan
Tipis Bilayer ZnO/TiO2 dengan Metode Spin Coating. Makassar : Universitas Hassanudin.
2014. Hal 2
Siswanto, Bambang. Wirjoardi, Tri Mardji Atmono, Yunanto. Karakterisasi Sifat Optik
Lapisan Tipis a-Si:H:B Untuk Bahan Sel Surya. Yogyakarta : Puslitbang Teknologi Maju
Batan.2006. Hal 3.

7
Lampiran 1. Data perhitungan pada masing-masing konsentrasi

Tabel 1 : 1.0 sccm

no. Wavelenght (nm) Transsmitance (%) alpha hv (eV) akar alpha*hv
1 640 0.141 1.02673E-05 1.9375 9.94642E-06
2 642 0.1445 1.01388E-05 1.931464174 9.79133E-06
3 644 0.148 1.00133E-05 1.925465839 9.64016E-06
4 646 0.1515 9.89083E-06 1.919504644 9.49274E-06
5 648 0.155 9.77112E-06 1.913580247 9.34891E-06
6 650 0.1585 9.65409E-06 1.907692308 9.20852E-06
7 652 0.162 9.53962E-06 1.901840491 9.07142E-06
8 654 0.1655 9.42759E-06 1.896024465 8.93747E-06
9 656 0.169 9.31791E-06 1.890243902 8.80656E-06
10 658 0.1725 9.21047E-06 1.88449848 8.67856E-06
11 660 0.176 9.1052E-06 1.878787879 8.55337E-06
12 662 0.1795 9.00199E-06 1.873111782 8.43087E-06
13 664 0.183 8.90078E-06 1.86746988 8.31097E-06
14 666 0.1865 8.80149E-06 1.861861862 8.19358E-06
15 668 0.19 8.70404E-06 1.856287425 8.0786E-06
16 670 0.1935 8.60837E-06 1.850746269 7.96596E-06
17 672 0.197 8.51442E-06 1.845238095 7.85557E-06
18 674 0.2005 8.42212E-06 1.839762611 7.74735E-06
19 676 0.204 8.33142E-06 1.834319527 7.64124E-06
20 678 0.2075 8.24226E-06 1.828908555 7.53717E-06
21 680 0.211 8.1546E-06 1.823529412 7.43507E-06
22 682 0.224 7.84124E-06 1.818181818 7.1284E-06
23 684 0.237 7.54557E-06 1.812865497 6.83955E-06
24 686 0.25 7.26569E-06 1.807580175 6.56666E-06
25 688 0.263 7.00001E-06 1.802325581 6.30815E-06
26 690 0.276 6.74714E-06 1.797101449 6.06265E-06
27 692 0.289 6.50592E-06 1.791907514 5.829E-06
28 694 0.302 6.27531E-06 1.786743516 5.60618E-06
29 696 0.315 6.05442E-06 1.781609195 5.3933E-06
30 698 0.328 5.84246E-06 1.776504298 5.18958E-06
31 700 0.341 5.63875E-06 1.771428571 4.99432E-06
32 702 0.3492 5.51421E-06 1.766381766 4.8701E-06
33 704 0.3574 5.39256E-06 1.761363636 4.74913E-06
34 706 0.3656 5.27367E-06 1.756373938 4.63126E-06
35 708 0.3738 5.15741E-06 1.751412429 4.51638E-06
36 710 0.382 5.04368E-06 1.746478873 4.40434E-06
37 712 0.3902 4.93237E-06 1.741573034 4.29504E-06
38 714 0.3984 4.82337E-06 1.736694678 4.18836E-06
39 716 0.4066 4.71659E-06 1.731843575 4.0842E-06
40 718 0.4148 4.61194E-06 1.727019499 3.98246E-06

8
41 720 0.423 4.50935E-06 1.722222222 3.88305E-06
42 722 0.4312 4.40872E-06 1.717451524 3.78588E-06
43 724 0.4394 4.30998E-06 1.712707182 3.69087E-06
44 726 0.4476 4.21308E-06 1.707988981 3.59795E-06
45 728 0.4558 4.11793E-06 1.703296703 3.50703E-06
46 730 0.464 4.02448E-06 1.698630137 3.41805E-06
47 732 0.4722 3.93267E-06 1.693989071 3.33095E-06
48 734 0.4804 3.84243E-06 1.689373297 3.24565E-06
49 736 0.4886 3.75373E-06 1.684782609 3.16211E-06
50 738 0.4968 3.6665E-06 1.680216802 3.08026E-06
51 740 0.505 3.5807E-06 1.675675676 3.00004E-06
52 742 0.5132 3.49628E-06 1.67115903 2.92142E-06
53 744 0.5214 3.4132E-06 1.666666667 2.84433E-06
54 746 0.5296 3.33141E-06 1.662198391 2.76873E-06
55 748 0.5378 3.25088E-06 1.657754011 2.69458E-06
56 750 0.546 3.17157E-06 1.653333333 2.62183E-06
57 752 0.5542 3.09345E-06 1.64893617 2.55045E-06
58 754 0.5624 3.01647E-06 1.644562334 2.48038E-06
59 756 0.5706 2.9406E-06 1.64021164 2.4116E-06
60 758 0.5788 2.86582E-06 1.635883905 2.34407E-06
61 760 0.587 2.79209E-06 1.631578947 2.27776E-06
62 762 0.5856 2.8046E-06 1.627296588 2.28196E-06
63 764 0.5842 2.81715E-06 1.623036649 2.28617E-06
64 766 0.5828 2.82972E-06 1.618798956 2.29038E-06
65 768 0.5814 2.84233E-06 1.614583333 2.29459E-06
66 770 0.58 2.85496E-06 1.61038961 2.2988E-06
67 772 0.5786 2.86763E-06 1.606217617 2.30302E-06
68 774 0.5772 2.88033E-06 1.602067183 2.30724E-06
69 776 0.5758 2.89306E-06 1.597938144 2.31146E-06
70 778 0.5744 2.90581E-06 1.593830334 2.31569E-06
71 780 0.5694 2.95164E-06 1.58974359 2.34617E-06
72 782 0.5644 2.99786E-06 1.585677749 2.37682E-06
73 784 0.5594 3.0445E-06 1.581632653 2.40764E-06
74 786 0.5544 3.09156E-06 1.577608142 2.43863E-06
75 788 0.5494 3.13904E-06 1.573604061 2.4698E-06
76 790 0.5444 3.18695E-06 1.569620253 2.50115E-06
77 792 0.5394 3.23531E-06 1.565656566 2.5327E-06
78 794 0.5344 3.28412E-06 1.561712846 2.56443E-06
79 796 0.5294 3.33339E-06 1.557788945 2.59636E-06
80 798 0.5244 3.38313E-06 1.553884712 2.62849E-06
81 800 0.5321 3.30673E-06 1.55 2.56271E-06
82 802 0.54 3.22949E-06 1.546134663 2.49661E-06
83 804 0.5479 3.15337E-06 1.542288557 2.4317E-06
84 806 0.5558 3.07834E-06 1.538461538 2.36795E-06
85 808 0.5637 3.00437E-06 1.534653465 2.30533E-06

9
 86 810 0.5716 2.93142E-06 1.530864198 2.24381E-06
87 812 0.5795 2.85948E-06 1.527093596 2.18335E-06
88 814 0.5874 2.78852E-06 1.523341523 2.12393E-06
89 816 0.5953 2.7185E-06 1.519607843 2.06553E-06
90 818 0.6032 2.6494E-06 1.515892421 2.00811E-06
91 820 0.6111 2.58121E-06 1.512195122 1.95165E-06
92 822 0.619 2.51389E-06 1.508515815 1.89612E-06
93 824 0.6269 2.44742E-06 1.504854369 1.84151E-06
94 826 0.6348 2.38179E-06 1.501210654 1.78778E-06
95 828 0.6427 2.31697E-06 1.497584541 1.73493E-06
96 830 0.6506 2.25294E-06 1.493975904 1.68292E-06
97 832 0.6585 2.18968E-06 1.490384615 1.63173E-06
98 834 0.6664 2.12718E-06 1.486810552 1.58135E-06
99 836 0.6743 2.06541E-06 1.483253589 1.53176E-06
100 838 0.6822 2.00436E-06 1.479713604 1.48294E-06
101 840 0.6901 1.94402E-06 1.476190476 1.43487E-06
102 842 0.698 1.88436E-06 1.472684086 1.38753E-06
103 844 0.7059 1.82538E-06 1.469194313 1.34092E-06
104 846 0.7138 1.76705E-06 1.46572104 1.295E-06
105 848 0.7217 1.70936E-06 1.462264151 1.24977E-06
106 850 0.7296 1.6523E-06 1.458823529 1.20521E-06
107 852 0.7375 1.59586E-06 1.455399061 1.1613E-06
108 854 0.7454 1.54001E-06 1.451990632 1.11804E-06
109 856 0.7533 1.48476E-06 1.448598131 1.07541E-06
110 858 0.7612 1.43008E-06 1.445221445 1.03339E-06
111 860 0.7691 1.37597E-06 1.441860465 9.91975E-07
112 862 0.777 1.32241E-06 1.438515081 9.5115E-07
113 864 0.764 1.41084E-06 1.435185185 1.01241E-06
114 866 0.751 1.50078E-06 1.43187067 1.07446E-06
115 868 0.738 1.5923E-06 1.428571429 1.13736E-06
116 870 0.725 1.68545E-06 1.425287356 1.20112E-06
117 872 0.712 1.78028E-06 1.422018349 1.2658E-06
118 874 0.699 1.87686E-06 1.418764302 1.33141E-06
119 876 0.686 1.97525E-06 1.415525114 1.39801E-06
120 878 0.673 2.07552E-06 1.412300683 1.46563E-06
121 880 0.66 2.17775E-06 1.409090909 1.53433E-06
122 882 0.647 2.28202E-06 1.405895692 1.60414E-06
123 884 0.634 2.3884E-06 1.402714932 1.67512E-06
124 886 0.621 2.49698E-06 1.399548533 1.74732E-06
125 888 0.608 2.60786E-06 1.396396396 1.82081E-06
126 890 0.595 2.72114E-06 1.393258427 1.89563E-06
127 892 0.6035 2.6468E-06 1.390134529 1.8397E-06
128 894 0.612 2.5735E-06 1.387024609 1.78475E-06
129 896 0.6205 2.5012E-06 1.383928571 1.73074E-06
130 898 0.629 2.4299E-06 1.380846325 1.67766E-06

10
131 900 0.6375 2.35954E-06 1.377777778 1.62546E-06
132 902 0.646 2.29012E-06 1.374722838 1.57414E-06
133 904 0.6545 2.22161E-06 1.371681416 1.52367E-06
134 906 0.663 2.15398E-06 1.368653422 1.47403E-06
135 908 0.6715 2.08722E-06 1.365638767 1.42519E-06
136 910 0.68 2.02129E-06 1.362637363 1.37714E-06
137 912 0.6885 1.95618E-06 1.359649123 1.32986E-06
138 914 0.697 1.89188E-06 1.356673961 1.28333E-06
139 916 0.7055 1.82835E-06 1.35371179 1.23753E-06
140 918 0.714 1.76558E-06 1.350762527 1.19244E-06
141 920 0.7225 1.70355E-06 1.347826087 1.14805E-06
142 922 0.731 1.64225E-06 1.344902386 1.10433E-06
143 924 0.7395 1.58166E-06 1.341991342 1.06129E-06
144 926 0.748 1.52176E-06 1.339092873 1.01889E-06
145 928 0.7565 1.46254E-06 1.336206897 9.77128E-07
146 930 0.765 1.40398E-06 1.333333333 9.35987E-07
147 932 0.7735 1.34607E-06 1.330472103 8.95452E-07
148 934 0.782 1.28879E-06 1.327623126 8.55512E-07
149 936 0.7905 1.23213E-06 1.324786325 8.16152E-07
150 938 0.799 1.17607E-06 1.32196162 7.7736E-07
151 940 0.8075 1.12061E-06 1.319148936 7.39125E-07
152 942 0.816 1.06573E-06 1.316348195 7.01435E-07
153 944 0.8245 1.01142E-06 1.313559322 6.64277E-07
154 946 0.833 9.57661E-07 1.310782241 6.27642E-07
155 948 0.8415 9.04451E-07 1.308016878 5.91519E-07
156 950 0.85 8.51776E-07 1.305263158 5.55896E-07
157 952 0.845 8.82697E-07 1.302521008 5.74866E-07
158 954 0.84 9.13802E-07 1.299790356 5.93875E-07
159 956 0.835 9.45092E-07 1.29707113 6.12926E-07
160 958 0.83 9.7657E-07 1.294363257 6.32018E-07
161 960 0.825 1.00824E-06 1.291666667 6.51154E-07
162 962 0.82 1.0401E-06 1.288981289 6.70334E-07
163 964 0.815 1.07215E-06 1.286307054 6.8956E-07
164 966 0.81 1.10441E-06 1.283643892 7.08833E-07
165 968 0.805 1.13686E-06 1.280991736 7.28155E-07
166 970 0.8 1.16952E-06 1.278350515 7.47525E-07
167 972 0.795 1.20238E-06 1.275720165 7.66947E-07
168 974 0.79 1.23544E-06 1.273100616 7.86421E-07
169 976 0.785 1.26872E-06 1.270491803 8.05948E-07
170 978 0.78 1.30221E-06 1.267893661 8.25531E-07
171 980 0.775 1.33591E-06 1.265306122 8.4517E-07
172 982 0.77 1.36984E-06 1.262729124 8.64866E-07
173 984 0.765 1.40398E-06 1.260162602 8.84622E-07
174 986 0.76 1.43835E-06 1.257606491 9.04438E-07
175 988 0.755 1.47294E-06 1.255060729 9.24316E-07

11
176 990 0.75 1.50777E-06 1.252525253 9.44259E-07
177 992 0.745 1.54283E-06 1.25 9.64266E-07
178 994 0.74 1.57812E-06 1.247484909 9.8434E-07
179 996 0.735 1.61365E-06 1.24497992 1.00448E-06
180 998 0.73 1.64943E-06 1.24248497 1.02469E-06
181 1000 0.725 1.68545E-06 1.24 1.04498E-06

Tabel 2 : 1.5 sccm

No wavelenght (nm) Transsmitance (%) alpha hv (eV) akar alpha*hv
1 680 0.121 1.1069E-05 1.823529412 1.00923E-05
2 682 0.1257 1.08693E-05 1.818181818 9.88116E-06
3 684 0.1304 1.06769E-05 1.812865497 9.67787E-06
4 686 0.1351 1.04913E-05 1.807580175 9.48193E-06
5 688 0.1398 1.03121E-05 1.802325581 9.29285E-06
6 690 0.1445 1.01388E-05 1.797101449 9.11019E-06
7 692 0.1492 9.971E-06 1.791907514 8.93356E-06
8 694 0.1539 9.80845E-06 1.786743516 8.76259E-06
9 696 0.1586 9.65079E-06 1.781609195 8.59696E-06
10 698 0.1633 9.49773E-06 1.776504298 8.43638E-06
11 700 0.168 9.34901E-06 1.771428571 8.28055E-06
12 702 0.1727 9.2044E-06 1.766381766 8.12924E-06
13 704 0.1774 9.06367E-06 1.761363636 7.98221E-06
14 706 0.1821 8.92662E-06 1.756373938 7.83924E-06
15 708 0.1868 8.79306E-06 1.751412429 7.70014E-06
16 710 0.1915 8.66283E-06 1.746478873 7.56472E-06
17 712 0.1962 8.53575E-06 1.741573034 7.43281E-06
18 714 0.2009 8.41168E-06 1.736694678 7.30426E-06
19 716 0.2056 8.29048E-06 1.731843575 7.1789E-06
20 718 0.2103 8.17201E-06 1.727019499 7.05661E-06
21 720 0.215 8.05617E-06 1.722222222 6.93726E-06
22 722 0.2197 7.94283E-06 1.717451524 6.82071E-06
23 724 0.2244 7.83189E-06 1.712707182 6.70687E-06
24 726 0.2291 7.72325E-06 1.707988981 6.59562E-06
25 728 0.2338 7.61682E-06 1.703296703 6.48685E-06
26 730 0.2385 7.51251E-06 1.698630137 6.38048E-06
27 732 0.2432 7.41023E-06 1.693989071 6.27642E-06
28 734 0.2479 7.3099E-06 1.689373297 6.17458E-06
29 736 0.2526 7.21147E-06 1.684782609 6.07488E-06
30 738 0.2573 7.11485E-06 1.680216802 5.97724E-06
31 740 0.262 7.01997E-06 1.675675676 5.8816E-06
32 742 0.2695 6.87205E-06 1.67115903 5.74214E-06
33 744 0.2738 6.78908E-06 1.666666667 5.65757E-06
34 746 0.2781 6.70741E-06 1.662198391 5.57453E-06
35 748 0.2824 6.627E-06 1.657754011 5.49296E-06

12
36 750 0.2867 6.54779E-06 1.653333333 5.41284E-06
37 752 0.291 6.46977E-06 1.64893617 5.33412E-06
38 754 0.2953 6.39289E-06 1.644562334 5.25675E-06
39 756 0.2996 6.31712E-06 1.64021164 5.18071E-06
40 758 0.3039 6.24243E-06 1.635883905 5.10595E-06
41 760 0.3082 6.1688E-06 1.631578947 5.03244E-06
42 762 0.3138 6.07442E-06 1.627296588 4.94244E-06
43 764 0.3198 5.97515E-06 1.623036649 4.84895E-06
44 766 0.3258 5.87773E-06 1.618798956 4.75743E-06
45 768 0.3318 5.78209E-06 1.614583333 4.66783E-06
46 770 0.3378 5.68816E-06 1.61038961 4.58008E-06
47 772 0.3438 5.59589E-06 1.606217617 4.49411E-06
48 774 0.3498 5.50521E-06 1.602067183 4.40986E-06
49 776 0.3558 5.41607E-06 1.597938144 4.32727E-06
50 778 0.3618 5.32843E-06 1.593830334 4.2463E-06
51 780 0.3678 5.24222E-06 1.58974359 4.16689E-06
52 782 0.3738 5.15741E-06 1.585677749 4.089E-06
53 784 0.3798 5.07395E-06 1.581632653 4.01257E-06
54 786 0.3858 4.9918E-06 1.577608142 3.93756E-06
55 788 0.3918 4.91092E-06 1.573604061 3.86392E-06
56 790 0.3978 4.83127E-06 1.569620253 3.79163E-06
57 792 0.4038 4.75281E-06 1.565656566 3.72063E-06
58 794 0.4098 4.6755E-06 1.561712846 3.6509E-06
59 796 0.4158 4.59932E-06 1.557788945 3.58239E-06
60 798 0.4218 4.52423E-06 1.553884712 3.51507E-06
61 800 0.4278 4.45021E-06 1.55 3.44891E-06
62 802 0.4222 4.51927E-06 1.546134663 3.4937E-06
63 804 0.4166 4.58925E-06 1.542288557 3.53897E-06
64 806 0.411 4.66018E-06 1.538461538 3.58475E-06
65 808 0.4054 4.73208E-06 1.534653465 3.63105E-06
66 810 0.3998 4.80498E-06 1.530864198 3.67789E-06
67 812 0.3942 4.87891E-06 1.527093596 3.72528E-06
68 814 0.3886 4.9539E-06 1.523341523 3.77324E-06
69 816 0.383 5.02998E-06 1.519607843 3.8218E-06
70 818 0.3774 5.10718E-06 1.515892421 3.87097E-06
71 820 0.3718 5.18553E-06 1.512195122 3.92077E-06
72 822 0.3662 5.26507E-06 1.508515815 3.97122E-06
73 824 0.3606 5.34584E-06 1.504854369 4.02235E-06
74 826 0.355 5.42787E-06 1.501210654 4.07419E-06
75 828 0.3635 5.30386E-06 1.497584541 3.97149E-06
76 830 0.372 5.18271E-06 1.493975904 3.87142E-06
77 832 0.3805 5.0643E-06 1.490384615 3.77388E-06
78 834 0.389 4.94851E-06 1.486810552 3.67875E-06
79 836 0.3975 4.83522E-06 1.483253589 3.58593E-06
80 838 0.406 4.72433E-06 1.479713604 3.49533E-06

13
 81 840 0.4145 4.61574E-06 1.476190476 3.40685E-06
82 842 0.423 4.50935E-06 1.472684086 3.32042E-06
83 844 0.4315 4.40507E-06 1.469194313 3.23595E-06
84 846 0.44 4.30283E-06 1.46572104 3.15338E-06
85 848 0.4485 4.20255E-06 1.462264151 3.07262E-06
86 850 0.457 4.10415E-06 1.458823529 2.99362E-06
87 852 0.4655 4.00756E-06 1.455399061 2.9163E-06
88 854 0.474 3.91273E-06 1.451990632 2.84062E-06
89 856 0.4825 3.81957E-06 1.448598131 2.76651E-06
90 858 0.491 3.72805E-06 1.445221445 2.69393E-06
91 860 0.4995 3.63809E-06 1.441860465 2.62281E-06
92 862 0.508 3.54965E-06 1.438515081 2.55311E-06
93 864 0.5165 3.46268E-06 1.435185185 2.4848E-06
94 866 0.525 3.37713E-06 1.43187067 2.41781E-06
95 868 0.5335 3.29296E-06 1.428571429 2.35211E-06
96 870 0.542 3.21011E-06 1.425287356 2.28767E-06
97 872 0.5505 3.12856E-06 1.422018349 2.22443E-06
98 874 0.559 3.04825E-06 1.418764302 2.16237E-06
99 876 0.5675 2.96915E-06 1.415525114 2.10146E-06
100 878 0.576 2.89123E-06 1.412300683 2.04165E-06
101 880 0.5845 2.81446E-06 1.409090909 1.98291E-06
102 882 0.593 2.73879E-06 1.405895692 1.92523E-06
103 884 0.6015 2.6642E-06 1.402714932 1.86855E-06
104 886 0.61 2.59065E-06 1.399548533 1.81287E-06
105 888 0.6185 2.51812E-06 1.396396396 1.75815E-06
106 890 0.627 2.44659E-06 1.393258427 1.70436E-06
107 892 0.62 2.50543E-06 1.390134529 1.74144E-06
108 894 0.613 2.56494E-06 1.387024609 1.77882E-06
109 896 0.606 2.62513E-06 1.383928571 1.8165E-06
110 898 0.599 2.68603E-06 1.380846325 1.85449E-06
111 900 0.592 2.74763E-06 1.377777778 1.89281E-06
112 902 0.585 2.80998E-06 1.374722838 1.93147E-06
113 904 0.578 2.87307E-06 1.371681416 1.97047E-06
114 906 0.571 2.93693E-06 1.368653422 2.00982E-06
115 908 0.564 3.00158E-06 1.365638767 2.04954E-06
116 910 0.557 3.06703E-06 1.362637363 2.08963E-06
117 912 0.55 3.13332E-06 1.359649123 2.13011E-06
118 914 0.543 3.20045E-06 1.356673961 2.17098E-06
119 916 0.536 3.26845E-06 1.35371179 2.21227E-06
120 918 0.529 3.33735E-06 1.350762527 2.25399E-06
121 920 0.522 3.40717E-06 1.347826087 2.29614E-06
122 922 0.515 3.47793E-06 1.344902386 2.33874E-06
123 924 0.508 3.54965E-06 1.341991342 2.3818E-06
124 926 0.501 3.62238E-06 1.339092873 2.42535E-06
125 928 0.494 3.69612E-06 1.336206897 2.46939E-06

14
126 930 0.487 3.77092E-06 1.333333333 2.51395E-06
127 932 0.4944 3.69188E-06 1.330472103 2.45597E-06
128 934 0.5018 3.61401E-06 1.327623126 2.39902E-06
129 936 0.5092 3.53729E-06 1.324786325 2.34307E-06
130 938 0.5166 3.46167E-06 1.32196162 2.2881E-06
131 940 0.524 3.38713E-06 1.319148936 2.23406E-06
132 942 0.5314 3.31363E-06 1.316348195 2.18094E-06
133 944 0.5388 3.24115E-06 1.313559322 2.12872E-06
134 946 0.5462 3.16965E-06 1.310782241 2.07736E-06
135 948 0.5536 3.09912E-06 1.308016878 2.02685E-06
136 950 0.561 3.02953E-06 1.305263158 1.97717E-06
137 952 0.5684 2.96085E-06 1.302521008 1.92828E-06
138 954 0.5758 2.89306E-06 1.299790356 1.88018E-06
139 956 0.5832 2.82613E-06 1.29707113 1.83284E-06
140 958 0.5906 2.76004E-06 1.294363257 1.78625E-06
141 960 0.598 2.69478E-06 1.291666667 1.74038E-06
142 962 0.6054 2.63032E-06 1.288981289 1.69522E-06
143 964 0.6128 2.56665E-06 1.286307054 1.65075E-06
144 966 0.6202 2.50374E-06 1.283643892 1.60695E-06
145 968 0.6276 2.44157E-06 1.280991736 1.56382E-06
146 970 0.635 2.38014E-06 1.278350515 1.52133E-06
147 972 0.6424 2.31941E-06 1.275720165 1.47946E-06
148 974 0.6498 2.25938E-06 1.273100616 1.43821E-06
149 976 0.6572 2.20004E-06 1.270491803 1.39756E-06
150 978 0.6646 2.14135E-06 1.267893661 1.3575E-06
151 980 0.672 2.08332E-06 1.265306122 1.31802E-06
152 982 0.6794 2.02592E-06 1.262729124 1.27909E-06
153 984 0.6868 1.96914E-06 1.260162602 1.24072E-06
154 986 0.6942 1.91297E-06 1.257606491 1.20288E-06
155 988 0.7016 1.8574E-06 1.255060729 1.16557E-06
156 990 0.709 1.80241E-06 1.252525253 1.12878E-06
157 992 0.7164 1.74799E-06 1.25 1.09249E-06
158 994 0.7238 1.69413E-06 1.247484909 1.0567E-06
159 996 0.7312 1.64082E-06 1.24497992 1.02139E-06
160 998 0.7386 1.58804E-06 1.24248497 9.8656E-07
161 1000 0.746 1.53579E-06 1.24 9.52193E-07

Tabel 3 : 1.8 sccm

No wavelenght (nm) Transsmitance (%) alpha hv (eV) akar alpha*hv
1 722 0.321 5.95552E-06 1.717451524 5.11416E-06
2 724 0.3265 5.86648E-06 1.712707182 5.02379E-06
3 726 0.332 5.77893E-06 1.707988981 4.93518E-06
4 728 0.3375 5.69282E-06 1.703296703 4.84828E-06
5 730 0.343 5.6081E-06 1.698630137 4.76304E-06

15
 6 732 0.3485 5.52472E-06 1.693989071 4.67941E-06
7 734 0.354 5.44265E-06 1.689373297 4.59734E-06
8 736 0.3595 5.36185E-06 1.684782609 4.51678E-06
9 738 0.365 5.28227E-06 1.680216802 4.43768E-06
10 740 0.3705 5.20389E-06 1.675675676 4.36001E-06
11 742 0.376 5.12666E-06 1.67115903 4.28373E-06
12 744 0.3815 5.05055E-06 1.666666667 4.20879E-06
13 746 0.387 4.97553E-06 1.662198391 4.13516E-06
14 748 0.3925 4.90157E-06 1.657754011 4.0628E-06
15 750 0.398 4.82863E-06 1.653333333 3.99167E-06
16 752 0.4035 4.7567E-06 1.64893617 3.92175E-06
17 754 0.409 4.68574E-06 1.644562334 3.853E-06
18 756 0.4145 4.61574E-06 1.64021164 3.78539E-06
19 758 0.42 4.54665E-06 1.635883905 3.71889E-06
20 760 0.4255 4.47846E-06 1.631578947 3.65348E-06
21 762 0.431 4.41115E-06 1.627296588 3.58912E-06
22 764 0.4365 4.34469E-06 1.623036649 3.5258E-06
23 766 0.442 4.27906E-06 1.618798956 3.46347E-06
24 768 0.4475 4.21425E-06 1.614583333 3.40213E-06
25 770 0.453 4.15023E-06 1.61038961 3.34174E-06
26 772 0.4585 4.08698E-06 1.606217617 3.28229E-06
27 774 0.464 4.02448E-06 1.602067183 3.22374E-06
28 776 0.4695 3.96272E-06 1.597938144 3.16609E-06
29 778 0.475 3.90168E-06 1.593830334 3.10931E-06
30 780 0.4805 3.84134E-06 1.58974359 3.05337E-06
31 782 0.486 3.78169E-06 1.585677749 2.99827E-06
32 784 0.4915 3.72271E-06 1.581632653 2.94398E-06
33 786 0.497 3.66439E-06 1.577608142 2.89048E-06
34 788 0.5025 3.60671E-06 1.573604061 2.83776E-06
35 790 0.508 3.54965E-06 1.569620253 2.7858E-06
36 792 0.5135 3.49321E-06 1.565656566 2.73459E-06
37 794 0.519 3.43738E-06 1.561712846 2.6841E-06
38 796 0.5245 3.38213E-06 1.557788945 2.63432E-06
39 798 0.53 3.32745E-06 1.553884712 2.58524E-06
40 800 0.5355 3.27335E-06 1.55 2.53684E-06
41 802 0.541 3.21979E-06 1.546134663 2.48911E-06
42 804 0.5465 3.16678E-06 1.542288557 2.44204E-06
43 806 0.552 3.11429E-06 1.538461538 2.39561E-06
44 808 0.5575 3.06233E-06 1.534653465 2.34981E-06
45 810 0.563 3.01088E-06 1.530864198 2.30462E-06
46 812 0.5685 2.95993E-06 1.527093596 2.26004E-06
47 814 0.574 2.90946E-06 1.523341523 2.21605E-06
48 816 0.5795 2.85948E-06 1.519607843 2.17265E-06
49 818 0.585 2.80998E-06 1.515892421 2.12981E-06
50 820 0.5905 2.76093E-06 1.512195122 2.08753E-06

16
51 822 0.596 2.71234E-06 1.508515815 2.0458E-06
52 824 0.6009 2.66943E-06 1.504854369 2.00855E-06
53 826 0.6058 2.62686E-06 1.501210654 1.97174E-06
54 828 0.6107 2.58464E-06 1.497584541 1.93536E-06
55 830 0.6156 2.54276E-06 1.493975904 1.89941E-06
56 832 0.6205 2.5012E-06 1.490384615 1.86388E-06
57 834 0.6254 2.45998E-06 1.486810552 1.82876E-06
58 836 0.6303 2.41907E-06 1.483253589 1.79405E-06
59 838 0.6352 2.37849E-06 1.479713604 1.75974E-06
60 840 0.6401 2.33821E-06 1.476190476 1.72582E-06
61 842 0.645 2.29824E-06 1.472684086 1.69229E-06
62 844 0.6499 2.25858E-06 1.469194313 1.65915E-06
63 846 0.6548 2.21921E-06 1.46572104 1.62637E-06
64 848 0.6597 2.18014E-06 1.462264151 1.59397E-06
65 850 0.6646 2.14135E-06 1.458823529 1.56193E-06
66 852 0.6695 2.10285E-06 1.455399061 1.53024E-06
67 854 0.6744 2.06463E-06 1.451990632 1.49891E-06
68 856 0.6793 2.02669E-06 1.448598131 1.46793E-06
69 858 0.6842 1.98902E-06 1.445221445 1.43729E-06
70 860 0.6891 1.95162E-06 1.441860465 1.40698E-06
71 862 0.694 1.91448E-06 1.438515081 1.37701E-06
72 864 0.6989 1.87761E-06 1.435185185 1.34736E-06
73 866 0.7038 1.84099E-06 1.43187067 1.31803E-06
74 868 0.7087 1.80463E-06 1.428571429 1.28902E-06
75 870 0.7136 1.76852E-06 1.425287356 1.26032E-06
76 872 0.7185 1.73265E-06 1.422018349 1.23193E-06
77 874 0.7234 1.69703E-06 1.418764302 1.20384E-06
78 876 0.7283 1.66165E-06 1.415525114 1.17605E-06
79 878 0.7332 1.6265E-06 1.412300683 1.14856E-06
80 880 0.7381 1.59159E-06 1.409090909 1.12135E-06
81 882 0.7363 1.60439E-06 1.405895692 1.1278E-06
82 884 0.7345 1.61722E-06 1.402714932 1.13425E-06
83 886 0.7327 1.63008E-06 1.399548533 1.14069E-06
84 888 0.7309 1.64297E-06 1.396396396 1.14712E-06
85 890 0.7291 1.65589E-06 1.393258427 1.15354E-06
86 892 0.7273 1.66885E-06 1.390134529 1.15996E-06
87 894 0.7255 1.68184E-06 1.387024609 1.16637E-06
88 896 0.7237 1.69486E-06 1.383928571 1.17278E-06
89 898 0.7219 1.70791E-06 1.380846325 1.17918E-06
90 900 0.7201 1.72099E-06 1.377777778 1.18557E-06
91 902 0.726 1.67822E-06 1.374722838 1.15355E-06
92 904 0.7319 1.6358E-06 1.371681416 1.1219E-06
93 906 0.7378 1.59372E-06 1.368653422 1.09063E-06
94 908 0.7437 1.55198E-06 1.365638767 1.05972E-06
95 910 0.7496 1.51056E-06 1.362637363 1.02918E-06

17
 96 912 0.7555 1.46947E-06 1.359649123 9.98984E-07
97 914 0.7614 1.4287E-06 1.356673961 9.69142E-07
98 916 0.7673 1.38825E-06 1.35371179 9.39643E-07
99 918 0.7732 1.3481E-06 1.350762527 9.10482E-07
100 920 0.7791 1.30826E-06 1.347826087 8.81653E-07
101 922 0.785 1.26872E-06 1.344902386 8.53152E-07
102 924 0.7909 1.22947E-06 1.341991342 8.24972E-07
103 926 0.7968 1.19052E-06 1.339092873 7.9711E-07
104 928 0.8027 1.15186E-06 1.336206897 7.69559E-07
105 930 0.8086 1.11347E-06 1.333333333 7.42316E-07
106 932 0.8145 1.07537E-06 1.330472103 7.15376E-07
107 934 0.8204 1.03754E-06 1.327623126 6.88733E-07
108 936 0.8263 9.99986E-07 1.324786325 6.62384E-07
109 938 0.8322 9.62696E-07 1.32196162 6.36324E-07
110 940 0.8381 9.2567E-07 1.319148936 6.10548E-07
111 942 0.844 8.88903E-07 1.316348195 5.85053E-07
112 944 0.8499 8.52393E-07 1.313559322 5.59834E-07
113 946 0.8558 8.16135E-07 1.310782241 5.34888E-07
114 948 0.8617 7.80126E-07 1.308016878 5.10209E-07
115 950 0.8676 7.44363E-07 1.305263158 4.85795E-07
116 952 0.8735 7.08843E-07 1.302521008 4.61641E-07
117 954 0.8794 6.73561E-07 1.299790356 4.37744E-07
118 956 0.8761 6.93265E-07 1.29707113 4.49607E-07
119 958 0.8728 7.13044E-07 1.294363257 4.61469E-07
120 960 0.8695 7.32898E-07 1.291666667 4.7333E-07
121 962 0.8662 7.52827E-07 1.288981289 4.8519E-07
122 964 0.8629 7.72833E-07 1.286307054 4.9705E-07
123 966 0.8596 7.92915E-07 1.283643892 5.0891E-07
124 968 0.8563 8.13074E-07 1.280991736 5.2077E-07
125 970 0.853 8.33311E-07 1.278350515 5.32632E-07
126 972 0.8497 8.53626E-07 1.275720165 5.44494E-07
127 974 0.8464 8.74021E-07 1.273100616 5.56358E-07
128 976 0.8431 8.94495E-07 1.270491803 5.68224E-07
129 978 0.8398 9.1505E-07 1.267893661 5.80093E-07
130 980 0.8365 9.35685E-07 1.265306122 5.91964E-07
131 982 0.8332 9.56402E-07 1.262729124 6.03839E-07
132 984 0.8299 9.77202E-07 1.260162602 6.15716E-07
133 986 0.8266 9.98084E-07 1.257606491 6.27598E-07
134 988 0.8233 1.01905E-06 1.255060729 6.39484E-07
135 990 0.82 1.0401E-06 1.252525253 6.51375E-07

Tabel 4 : 2.5 sccm

No wavelenght (nm) Transsmitance (%) alpha hv (eV) akar alpha*hv

18
 1 680 0.331 5.79474E-06 1.823529412 5.28344E-06
2 682 0.337 5.70059E-06 1.818181818 5.18235E-06
3 684 0.343 5.6081E-06 1.812865497 5.08336E-06
4 686 0.349 5.51721E-06 1.807580175 4.9864E-06
5 688 0.355 5.42787E-06 1.802325581 4.89139E-06
6 690 0.361 5.34003E-06 1.797101449 4.79829E-06
7 692 0.367 5.25363E-06 1.791907514 4.70701E-06
8 694 0.373 5.16864E-06 1.786743516 4.61752E-06
9 696 0.379 5.08501E-06 1.781609195 4.52975E-06
10 698 0.385 5.00268E-06 1.776504298 4.44364E-06
11 700 0.391 4.92163E-06 1.771428571 4.35916E-06
12 702 0.397 4.84182E-06 1.766381766 4.27625E-06
13 704 0.403 4.7632E-06 1.761363636 4.19486E-06
14 706 0.409 4.68574E-06 1.756373938 4.11496E-06
15 708 0.415 4.60942E-06 1.751412429 4.0365E-06
16 710 0.421 4.53418E-06 1.746478873 3.95943E-06
17 712 0.427 4.46002E-06 1.741573034 3.88372E-06
18 714 0.433 4.38688E-06 1.736694678 3.80934E-06
19 716 0.439 4.31476E-06 1.731843575 3.73624E-06
20 718 0.445 4.24361E-06 1.727019499 3.6644E-06
21 720 0.451 4.17342E-06 1.722222222 3.59378E-06
22 722 0.457 4.10415E-06 1.717451524 3.52434E-06
23 724 0.463 4.03579E-06 1.712707182 3.45606E-06
24 726 0.469 3.9683E-06 1.707988981 3.38891E-06
25 728 0.475 3.90168E-06 1.703296703 3.32286E-06
26 730 0.481 3.83589E-06 1.698630137 3.25788E-06
27 732 0.487 3.77092E-06 1.693989071 3.19395E-06
28 734 0.493 3.70674E-06 1.689373297 3.13103E-06
29 736 0.499 3.64334E-06 1.684782609 3.06912E-06
30 738 0.505 3.5807E-06 1.680216802 3.00817E-06
31 740 0.511 3.51879E-06 1.675675676 2.94818E-06
32 742 0.517 3.45761E-06 1.67115903 2.88911E-06
33 744 0.523 3.39714E-06 1.666666667 2.83095E-06
34 746 0.529 3.33735E-06 1.662198391 2.77367E-06
35 748 0.535 3.27824E-06 1.657754011 2.71726E-06
36 750 0.541 3.21979E-06 1.653333333 2.66169E-06
37 752 0.547 3.16198E-06 1.64893617 2.60695E-06
38 754 0.553 3.10481E-06 1.644562334 2.55302E-06
39 756 0.559 3.04825E-06 1.64021164 2.49989E-06
40 758 0.565 2.99229E-06 1.635883905 2.44752E-06
41 760 0.571 2.93693E-06 1.631578947 2.39592E-06
42 762 0.577 2.88214E-06 1.627296588 2.34505E-06
43 764 0.583 2.82793E-06 1.623036649 2.29491E-06
44 766 0.589 2.77426E-06 1.618798956 2.24549E-06
45 768 0.595 2.72114E-06 1.614583333 2.19676E-06

19
46 770 0.601 2.66856E-06 1.61038961 2.14871E-06
47 772 0.607 2.61649E-06 1.606217617 2.10133E-06
48 774 0.613 2.56494E-06 1.602067183 2.0546E-06
49 776 0.619 2.51389E-06 1.597938144 2.00852E-06
50 778 0.625 2.46333E-06 1.593830334 1.96307E-06
51 780 0.631 2.41326E-06 1.58974359 1.91823E-06
52 782 0.637 2.36366E-06 1.585677749 1.874E-06
53 784 0.643 2.31452E-06 1.581632653 1.83036E-06
54 786 0.649 2.26584E-06 1.577608142 1.78731E-06
55 788 0.655 2.21761E-06 1.573604061 1.74482E-06
56 790 0.661 2.16982E-06 1.569620253 1.7029E-06
57 792 0.667 2.12246E-06 1.565656566 1.66152E-06
58 794 0.673 2.07552E-06 1.561712846 1.62069E-06
59 796 0.679 2.029E-06 1.557788945 1.58038E-06
60 798 0.685 1.9829E-06 1.553884712 1.5406E-06
61 800 0.691 1.93719E-06 1.55 1.50132E-06
62 802 0.6944 1.91146E-06 1.546134663 1.47769E-06
63 804 0.6978 1.88586E-06 1.542288557 1.45427E-06
64 806 0.7012 1.86039E-06 1.538461538 1.43107E-06
65 808 0.7046 1.83504E-06 1.534653465 1.40807E-06
66 810 0.708 1.80981E-06 1.530864198 1.38528E-06
67 812 0.7114 1.7847E-06 1.527093596 1.3627E-06
68 814 0.7148 1.75971E-06 1.523341523 1.34032E-06
69 816 0.7182 1.73484E-06 1.519607843 1.31814E-06
70 818 0.7216 1.71009E-06 1.515892421 1.29615E-06
71 820 0.725 1.68545E-06 1.512195122 1.27436E-06
72 822 0.7284 1.66093E-06 1.508515815 1.25277E-06
73 824 0.7318 1.63652E-06 1.504854369 1.23136E-06
74 826 0.7352 1.61223E-06 1.501210654 1.21015E-06
75 828 0.7386 1.58804E-06 1.497584541 1.18911E-06
76 830 0.742 1.56397E-06 1.493975904 1.16827E-06
77 832 0.7454 1.54001E-06 1.490384615 1.14761E-06
78 834 0.7488 1.51616E-06 1.486810552 1.12712E-06
79 836 0.7522 1.49242E-06 1.483253589 1.10682E-06
80 838 0.7556 1.46878E-06 1.479713604 1.08669E-06
81 840 0.759 1.44525E-06 1.476190476 1.06673E-06
82 842 0.7624 1.42182E-06 1.472684086 1.04695E-06
83 844 0.7658 1.3985E-06 1.469194313 1.02734E-06
84 846 0.7692 1.37528E-06 1.46572104 1.00789E-06
85 848 0.7726 1.35217E-06 1.462264151 9.88614E-07
86 850 0.776 1.32915E-06 1.458823529 9.69501E-07
87 852 0.7794 1.30624E-06 1.455399061 9.50551E-07
88 854 0.7828 1.28343E-06 1.451990632 9.31763E-07
89 856 0.7862 1.26071E-06 1.448598131 9.13133E-07
90 858 0.7896 1.2381E-06 1.445221445 8.94662E-07

20
 91 860 0.793 1.21558E-06 1.441860465 8.76346E-07
92 862 0.7964 1.19315E-06 1.438515081 8.58185E-07
93 864 0.7998 1.17083E-06 1.435185185 8.40176E-07
94 866 0.8032 1.14859E-06 1.43187067 8.22318E-07
95 868 0.8066 1.12645E-06 1.428571429 8.0461E-07
96 870 0.81 1.10441E-06 1.425287356 7.87049E-07
97 872 0.808 1.11736E-06 1.422018349 7.94457E-07
98 874 0.806 1.13035E-06 1.418764302 8.01853E-07
99 876 0.804 1.14338E-06 1.415525114 8.09238E-07
100 878 0.802 1.15643E-06 1.412300683 8.16613E-07
101 880 0.8 1.16952E-06 1.409090909 8.23977E-07
102 882 0.798 1.18263E-06 1.405895692 8.3133E-07
103 884 0.796 1.19579E-06 1.402714932 8.38674E-07
104 886 0.794 1.20897E-06 1.399548533 8.46007E-07
105 888 0.792 1.22219E-06 1.396396396 8.53331E-07
106 890 0.79 1.23544E-06 1.393258427 8.60645E-07
107 892 0.788 1.24873E-06 1.390134529 8.6795E-07
108 894 0.786 1.26205E-06 1.387024609 8.75245E-07
109 896 0.784 1.2754E-06 1.383928571 8.82531E-07
110 898 0.782 1.28879E-06 1.380846325 8.89808E-07
111 900 0.78 1.30221E-06 1.377777778 8.97077E-07
112 902 0.7843 1.27339E-06 1.374722838 8.75282E-07
113 904 0.7886 1.24474E-06 1.371681416 8.53692E-07
114 906 0.7929 1.21624E-06 1.368653422 8.32304E-07
115 908 0.7972 1.18789E-06 1.365638767 8.11115E-07
116 910 0.8015 1.1597E-06 1.362637363 7.90124E-07
117 912 0.8058 1.13165E-06 1.359649123 7.69327E-07
118 914 0.8101 1.10376E-06 1.356673961 7.48722E-07
119 916 0.8144 1.07601E-06 1.35371179 7.28307E-07
120 918 0.8187 1.04841E-06 1.350762527 7.0808E-07
121 920 0.823 1.02096E-06 1.347826087 6.88038E-07
122 922 0.8273 9.93647E-07 1.344902386 6.68179E-07
123 924 0.8316 9.66477E-07 1.341991342 6.48502E-07
124 926 0.8359 9.39446E-07 1.339092873 6.29003E-07
125 928 0.8402 9.12554E-07 1.336206897 6.09681E-07
126 930 0.8445 8.85799E-07 1.333333333 5.90533E-07
127 932 0.8488 8.59181E-07 1.330472103 5.71558E-07
128 934 0.8531 8.32697E-07 1.327623126 5.52754E-07
129 936 0.8574 8.06346E-07 1.324786325 5.34118E-07
130 938 0.8617 7.80126E-07 1.32196162 5.15649E-07
131 940 0.866 7.54038E-07 1.319148936 4.97344E-07
132 942 0.8703 7.28078E-07 1.316348195 4.79202E-07
133 944 0.8746 7.02247E-07 1.313559322 4.61221E-07
134 946 0.8789 6.76542E-07 1.310782241 4.43399E-07
135 948 0.8832 6.50962E-07 1.308016878 4.25735E-07

21
136 950 0.8875 6.25507E-07 1.305263158 4.08226E-07
137 952 0.8856 6.3674E-07 1.302521008 4.14683E-07
138 954 0.8837 6.47996E-07 1.299790356 4.21129E-07
139 956 0.8818 6.59277E-07 1.29707113 4.27564E-07
140 958 0.8799 6.70582E-07 1.294363257 4.33988E-07
141 960 0.878 6.81911E-07 1.291666667 4.40401E-07
142 962 0.8761 6.93265E-07 1.288981289 4.46803E-07
143 964 0.8742 7.04644E-07 1.286307054 4.53194E-07
144 966 0.8723 7.16048E-07 1.283643892 4.59575E-07
145 968 0.8704 7.27476E-07 1.280991736 4.65945E-07
146 970 0.8685 7.38929E-07 1.278350515 4.72305E-07
147 972 0.8666 7.50408E-07 1.275720165 4.78655E-07
148 974 0.8647 7.61911E-07 1.273100616 4.84995E-07
149 976 0.8628 7.7344E-07 1.270491803 4.91325E-07
150 978 0.8609 7.84994E-07 1.267893661 4.97645E-07
151 980 0.859 7.96574E-07 1.265306122 5.03955E-07
152 982 0.8571 8.0818E-07 1.262729124 5.10256E-07
153 984 0.8552 8.19811E-07 1.260162602 5.16548E-07
154 986 0.8533 8.31468E-07 1.257606491 5.2283E-07
155 988 0.8514 8.43151E-07 1.255060729 5.29103E-07
156 990 0.8495 8.5486E-07 1.252525253 5.35367E-07
157 992 0.8476 8.66596E-07 1.25 5.41622E-07
158 994 0.8457 8.78357E-07 1.247484909 5.47869E-07
159 996 0.8438 8.90146E-07 1.24497992 5.54107E-07
160 998 0.8419 9.0196E-07 1.24248497 5.60336E-07
161 1000 0.84 9.13802E-07 1.24 5.66557E-07

Tabel 5 : 3.5 sccm

No wavelenght (nm) Transsmitance (%) alpha hv(eV) akar alpha*hv
1 600 0.111 1.15211E-05 2.066666667 1.19051E-05
2 602 0.1122 1.14647E-05 2.059800664 1.18075E-05
3 604 0.1134 1.1409E-05 2.052980132 1.17112E-05
4 606 0.1146 1.13538E-05 2.04620462 1.16161E-05
5 608 0.1158 1.12992E-05 2.039473684 1.15222E-05
6 610 0.117 1.12452E-05 2.032786885 1.14295E-05
7 612 0.1182 1.11917E-05 2.026143791 1.1338E-05
8 614 0.1194 1.11388E-05 2.019543974 1.12476E-05
9 616 0.1206 1.10864E-05 2.012987013 1.11583E-05
10 618 0.1218 1.10345E-05 2.006472492 1.10702E-05
11 620 0.123 1.09831E-05 2 1.09831E-05
12 622 0.1242 1.09322E-05 1.993569132 1.0897E-05
13 624 0.1254 1.08818E-05 1.987179487 1.0812E-05
14 626 0.1266 1.08319E-05 1.980830671 1.07281E-05
15 628 0.1278 1.07824E-05 1.974522293 1.06451E-05

22
16 630 0.129 1.07335E-05 1.968253968 1.05631E-05
17 632 0.1302 1.06849E-05 1.962025316 1.0482E-05
18 634 0.1314 1.06368E-05 1.955835962 1.0402E-05
19 636 0.1326 1.05892E-05 1.949685535 1.03228E-05
20 638 0.1338 1.0542E-05 1.943573668 1.02446E-05
21 640 0.135 1.04952E-05 1.9375 1.01672E-05
22 642 0.1362 1.04488E-05 1.931464174 1.00907E-05
23 644 0.1374 1.04028E-05 1.925465839 1.00151E-05
24 646 0.1386 1.03572E-05 1.919504644 9.94039E-06
25 648 0.1398 1.03121E-05 1.913580247 9.86648E-06
26 650 0.141 1.02673E-05 1.907692308 9.7934E-06
27 652 0.1422 1.02229E-05 1.901840491 9.72112E-06
28 654 0.1434 1.01788E-05 1.896024465 9.64964E-06
29 656 0.1446 1.01351E-05 1.890243902 9.57894E-06
30 658 0.1458 1.00918E-05 1.88449848 9.50901E-06
31 660 0.147 1.00489E-05 1.878787879 9.43984E-06
32 740 0.211 8.1546E-06 1.675675676 6.83223E-06
33 742 0.2157 8.03913E-06 1.67115903 6.71734E-06
34 744 0.2204 7.92616E-06 1.666666667 6.60513E-06
35 746 0.2251 7.81557E-06 1.662198391 6.49551E-06
36 748 0.2298 7.70726E-06 1.657754011 6.38837E-06
37 750 0.2345 7.60115E-06 1.653333333 6.28362E-06
38 752 0.2392 7.49714E-06 1.64893617 6.18116E-06
39 754 0.2439 7.39516E-06 1.644562334 6.0809E-06
40 756 0.2486 7.29513E-06 1.64021164 5.98278E-06
41 758 0.2533 7.19696E-06 1.635883905 5.8867E-06
42 760 0.258 7.10061E-06 1.631578947 5.7926E-06
43 762 0.2627 7.00599E-06 1.627296588 5.70041E-06
44 764 0.2674 6.91305E-06 1.623036649 5.61007E-06
45 766 0.2721 6.82173E-06 1.618798956 5.5215E-06
46 768 0.2768 6.73197E-06 1.614583333 5.43466E-06
47 770 0.2815 6.64373E-06 1.61038961 5.34949E-06
48 772 0.2862 6.55694E-06 1.606217617 5.26594E-06
49 774 0.2909 6.47157E-06 1.602067183 5.18395E-06
50 776 0.2956 6.38757E-06 1.597938144 5.10347E-06
51 778 0.3003 6.30489E-06 1.593830334 5.02446E-06
52 780 0.305 6.2235E-06 1.58974359 4.94688E-06
53 782 0.3097 6.14335E-06 1.585677749 4.87069E-06
54 784 0.3144 6.06441E-06 1.581632653 4.79583E-06
55 786 0.3191 5.98664E-06 1.577608142 4.72229E-06
56 788 0.3238 5.91001E-06 1.573604061 4.65001E-06
57 790 0.3285 5.83448E-06 1.569620253 4.57896E-06
58 792 0.3332 5.76002E-06 1.565656566 4.50911E-06
59 794 0.3379 5.68661E-06 1.561712846 4.44043E-06
60 796 0.3426 5.61421E-06 1.557788945 4.37288E-06

23
 61 798 0.3473 5.5428E-06 1.553884712 4.30644E-06
62 800 0.352 5.47235E-06 1.55 4.24107E-06
63 802 0.3567 5.40283E-06 1.546134663 4.17675E-06
64 804 0.3614 5.33422E-06 1.542288557 4.11346E-06
65 806 0.3661 5.2665E-06 1.538461538 4.05116E-06
66 808 0.3708 5.19965E-06 1.534653465 3.98983E-06
67 810 0.3755 5.13363E-06 1.530864198 3.92945E-06
68 812 0.3802 5.06844E-06 1.527093596 3.86999E-06
69 814 0.3849 5.00404E-06 1.523341523 3.81143E-06
70 816 0.3896 4.94043E-06 1.519607843 3.75376E-06
71 818 0.3943 4.87759E-06 1.515892421 3.69695E-06
72 820 0.399 4.81548E-06 1.512195122 3.64097E-06
73 822 0.4037 4.75411E-06 1.508515815 3.58582E-06
74 824 0.4084 4.69344E-06 1.504854369 3.53147E-06
75 826 0.4131 4.63347E-06 1.501210654 3.47791E-06
76 828 0.4178 4.57417E-06 1.497584541 3.42511E-06
77 830 0.4225 4.51554E-06 1.493975904 3.37306E-06
78 832 0.4272 4.45756E-06 1.490384615 3.32174E-06
79 834 0.4319 4.40022E-06 1.486810552 3.27114E-06
80 836 0.4366 4.34349E-06 1.483253589 3.22125E-06
81 838 0.4413 4.28737E-06 1.479713604 3.17204E-06
82 840 0.446 4.23185E-06 1.476190476 3.12351E-06
83 842 0.4507 4.1769E-06 1.472684086 3.07563E-06
84 844 0.4554 4.12253E-06 1.469194313 3.0284E-06
85 846 0.4601 4.06872E-06 1.46572104 2.9818E-06
86 848 0.4648 4.01545E-06 1.462264151 2.93583E-06
87 850 0.4695 3.96272E-06 1.458823529 2.89045E-06
88 852 0.4742 3.91051E-06 1.455399061 2.84568E-06
89 854 0.4789 3.85882E-06 1.451990632 2.80149E-06
90 856 0.4836 3.80764E-06 1.448598131 2.75787E-06
91 858 0.4883 3.75695E-06 1.445221445 2.71481E-06
92 860 0.493 3.70674E-06 1.441860465 2.6723E-06
93 862 0.4977 3.65701E-06 1.438515081 2.63033E-06
94 864 0.5024 3.60775E-06 1.435185185 2.58889E-06
95 866 0.5071 3.55895E-06 1.43187067 2.54798E-06
96 868 0.5118 3.51059E-06 1.428571429 2.50757E-06
97 870 0.5165 3.46268E-06 1.425287356 2.46766E-06
98 872 0.5212 3.41521E-06 1.422018349 2.42824E-06
99 874 0.5259 3.36816E-06 1.418764302 2.38931E-06
100 876 0.5306 3.32152E-06 1.415525114 2.35085E-06
101 878 0.5353 3.2753E-06 1.412300683 2.31286E-06
102 880 0.54 3.22949E-06 1.409090909 2.27532E-06
103 882 0.5447 3.18407E-06 1.405895692 2.23823E-06
104 884 0.5494 3.13904E-06 1.402714932 2.20159E-06
105 886 0.5541 3.09439E-06 1.399548533 2.16538E-06

24
106 888 0.5588 3.05012E-06 1.396396396 2.12959E-06
107 890 0.5635 3.00623E-06 1.393258427 2.09422E-06
108 892 0.5682 2.96269E-06 1.390134529 2.05927E-06
109 894 0.5729 2.91952E-06 1.387024609 2.02472E-06
110 896 0.5776 2.8767E-06 1.383928571 1.99057E-06
111 898 0.5823 2.83422E-06 1.380846325 1.95681E-06
112 900 0.587 2.79209E-06 1.377777778 1.92344E-06
113 902 0.5917 2.75029E-06 1.374722838 1.89044E-06
114 904 0.5964 2.70882E-06 1.371681416 1.85782E-06
115 906 0.6011 2.66768E-06 1.368653422 1.82557E-06
116 908 0.6058 2.62686E-06 1.365638767 1.79367E-06
117 910 0.6105 2.58636E-06 1.362637363 1.76213E-06
118 912 0.6152 2.54616E-06 1.359649123 1.73094E-06
119 914 0.6199 2.50627E-06 1.356673961 1.7001E-06
120 916 0.6246 2.46669E-06 1.35371179 1.66959E-06
121 918 0.6293 2.4274E-06 1.350762527 1.63942E-06
122 920 0.634 2.3884E-06 1.347826087 1.60957E-06
123 922 0.6387 2.34969E-06 1.344902386 1.58005E-06
124 924 0.6434 2.31126E-06 1.341991342 1.55085E-06
125 926 0.6481 2.27311E-06 1.339092873 1.52196E-06
126 928 0.6528 2.23524E-06 1.336206897 1.49337E-06
127 930 0.6575 2.19764E-06 1.333333333 1.4651E-06
128 932 0.6622 2.16031E-06 1.330472103 1.43712E-06
129 934 0.6669 2.12325E-06 1.327623126 1.40943E-06
130 936 0.6716 2.08644E-06 1.324786325 1.38204E-06
131 938 0.6763 2.04989E-06 1.32196162 1.35494E-06
132 940 0.681 2.01359E-06 1.319148936 1.32811E-06
133 942 0.6857 1.97754E-06 1.316348195 1.30157E-06
134 944 0.6904 1.94174E-06 1.313559322 1.2753E-06
135 946 0.6951 1.90618E-06 1.310782241 1.24929E-06
136 948 0.6998 1.87086E-06 1.308016878 1.22356E-06
137 950 0.7045 1.83578E-06 1.305263158 1.19809E-06
138 952 0.7092 1.80093E-06 1.302521008 1.17288E-06
139 954 0.7139 1.76631E-06 1.299790356 1.14792E-06
140 956 0.7186 1.73192E-06 1.29707113 1.12321E-06
141 958 0.7233 1.69775E-06 1.294363257 1.09875E-06
142 960 0.728 1.66381E-06 1.291666667 1.07454E-06
143 962 0.725 1.68545E-06 1.288981289 1.08626E-06
144 964 0.7248 1.68689E-06 1.286307054 1.08493E-06
145 966 0.7246 1.68834E-06 1.283643892 1.08361E-06
146 968 0.7244 1.68979E-06 1.280991736 1.0823E-06
147 970 0.7242 1.69124E-06 1.278350515 1.081E-06
148 972 0.724 1.69268E-06 1.275720165 1.07969E-06
149 974 0.7238 1.69413E-06 1.273100616 1.0784E-06
150 976 0.7236 1.69558E-06 1.270491803 1.07711E-06

25
151 978 0.7234 1.69703E-06 1.267893661 1.07583E-06
152 980 0.7232 1.69848E-06 1.265306122 1.07455E-06
153 982 0.723 1.69993E-06 1.262729124 1.07327E-06
154 984 0.7228 1.70138E-06 1.260162602 1.07201E-06
155 986 0.7226 1.70283E-06 1.257606491 1.07074E-06
156 988 0.7224 1.70428E-06 1.255060729 1.06949E-06
157 990 0.7222 1.70573E-06 1.252525253 1.06823E-06
158 992 0.722 1.70718E-06 1.25 1.06699E-06
159 994 0.7218 1.70863E-06 1.247484909 1.06575E-06
160 996 0.7216 1.71009E-06 1.24497992 1.06451E-06
161 998 0.7214 1.71154E-06 1.24248497 1.06328E-06
162 1000 0.7212 1.71299E-06 1.24 1.06205E-06

26
Lampiran 2. Perhitungan Indeks dan Ketebalan Lapisan

4
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27
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28
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29
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30
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31
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32
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33
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34