Tugas Tambahan UTS - Perancangan Eksperimen - Kholifah Ikhtari
Tugas Tambahan UTS - Perancangan Eksperimen - Kholifah Ikhtari
NIM : 1202913013
Mata Kuliah : Tugas Tambahan UTS
Perancangan Eksperimen
Fakultas : FTIK
Prodi : Teknik Industri
Problems :
6.13 Continuation of Problem 6.12.Use the regression model in part (c) of Problem 6.12 to
generate a response sur-face contour plot for epitaxial layer thickness. Suppose it is critically
important to obtain layer thickness of 14.5$m. What settings of arsenic flow rate and
decomposition time wouldyou recommend?
Solution :
Because problem 6.13 related with problems 6.12 point C, we should solved problems 6.12 point a,b,c first.
Output Minitab :
Design Expert Output
Faktor A :
Faktor B :
From the analysis of variance shown below, no factors appear to be important. Factor B is only marginally
interesting with an F-value of 4.31.
The "Model F-value" of 2.19 implies the model is not significant relative to the noise. There is a 14.25 % chance
that a "Model F-value" this large could occur due to noise.
Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case there are no significant
model terms.
(C) Write down a regression equation that could be used to predict epitaxial layer thickness over the region of
arsenic flow rate and deposition time used in this experiment.
Back to question 6.13 Problems, Use the regression model in part (c) of Problem 6.12 to generate a response sur-
face contour plot for epitaxial layer thickness to obtain layer thickness of 14.5$m. What settings of arsenic flow rate
and decomposition time recommended is :
Arsenic flow rate may be set at any of the experimental levels, while the deposition time should be set at 12.4
minutes. Detail on below :