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Application of Thin Film Coating
Thin-film Category Typical Application
• Optical Reflective/antireflective coatings
Interference filters
Decoration (colour, luster)
Memory discs (CDs)
Waveguides
• Electrical Insulation
Conduction
Semiconductor devices
Piezoelectric drivers
• Magnetic Memory discs
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PELAPISAN CVD DAN PVD
Kondisi vakum /
bertekanan rendah Fasa uap
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TUJUAN PELAPISAN
Memperbaiki:
--Sifat ketahan aus, dari perkakas potong, bantalan ✓
--Konduktivitas listrik, dari komponen elektronik
--Sifat optik, dari bahan kaca dan plastik
--Ketahanan korosi, dari komponen industri kimia
S/D 35 X
S/D 3 X
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CVD vs PVD
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PELAPISAN CVD
(aplikasi tribologi)
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JENIS-JENIS PROSES CVD
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Peralatan Proses Thermal CVD
THERMAL CVD
Reaktor
Gas Reaktan H2
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Peralatan Proses Thermal CVD
RF PLASMA CVD
Heater Heater
Input gases
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Urutan Langkah Proses CVD
1. Source-gas
supply 1. Gasseous fluids flow to the reactor.
2. Forced convection due to a pressure gradient.
2. Forced
convection 3. Free convection due to buoyancy of hot gas.
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Contoh Reaksi Fasa Gas dan Permukaan
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Lapisan CVD Aplikasi Tribologi
Material Kekerasan Temperatur dan
Lapisan (VHN) Tekanan Proses
TiC 3200 900-1200 ºC < 200 torr
TiN 2000 550-950 10-70 torr
TiCN 2500 700-900
Al2O3 2100 850-1100 ~50 torr
WC 2400 400-1000
SiC 2500
TiB2 3300
VC 2600 Keunggulan:
Si3N4 2800 kekerasan
B4C 3000
Stabilitas ikatan kimia
Koefisien friksi
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REAKSI DEPOSISI PADA PERMUKAN
-- Pirolisis atau dekomposisi termal
Ni(CO)4 = Ni + 4 CO
--Reduksi
WF6 + 3H2 = W + 6HF
-- Oksidasi
SiH4 + O2 = Si O2 + 2H2
--Hidrolisa
Al2Cl6 + 3CO2 + 3H2 = Al2O3 + 3CO + 6HCl
--Pembentukan karbida
TiCl4 + CH4 = TiC + 4HCl
--Pembentukan nitrida
TiCl4 + 1/2N2 + 2H2 = TiN + 4HCl
--Ko-reduksi
TiCl4 + 2BCl + 5H2 = TiB2 + 10HCl
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APLIKASI CVD HARD COATINGS
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CONTOH KOMPONEN YANG DILAPISI
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FOTO PENAMPANG LAPISAN
Pahat bubut
Keuntungan:
--umur pakai 20X
--kecepatan potong
--dapat memotong material
Ti, Al yang sulit dibubut.
Lapidan TiN
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KARAKTERISTIK PROSES CVD
KEUNGGULAN
--Dapat melapisi substrat dengan bahan refraktori
dibawah temperatur lelehnya atau temperatur sinter
--Densitas lapisan mecapai theoretcal density
--Orientasi dan ukuran butiran dapat dikontrol
--Proses dapat dilakukan pada kondisi mencapai tekanan atmosfir
--Ikatan lekat terhadap substrate memadai
--Komponen berlubang geometri kompleks dapat dilapis
KETERBATASAN
--Aplikasi terbatas pada substrat yang memiliki kestabilan
struktur pada temperatur meningkat
--Beberapa gas reaktan beracun (hazardous & toxic)
--Memerlukan energi proses yang besar, sehingga sering dijumpai
efisiensi proses rendah dan biaya tinggi
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PYHSICAL VAPOUR DEPOSITION (PVD)
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DASAR KLASIFIKASI PVD :
--Pertama, berdasarkan jenis sumber penguapannya
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KLASIFIKASI PROSES PVD
Process designation Source Chemical Activation Ion Substrate
Reaction of gas bombardment
Thermal Atom ejection Ion beam of substrate
evaporation (sputtering) generation
Vacuum coating
Reactive evaporation
Activated reactive
evaporation
Sputter coating
Reactive sputtering
Reactive bias sputtering
Ion plating
Reactive ion plating
Biased activated reac-
tive evaporation
Metal Temperature C
Ag 1030
Al 1220
Au 1400
Cd 265
Co 1520
Cr 1400
Cu 1260
Fe 1480
Hf 2400
Ni 1530
Mo 2530
Pb 715
W 3230
Zn 345
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METODA THERMAL
EVAPORATIVE
•Terdiri dari dua jenis : resistance heated dan electron
beam heated vacuum evaporation source
• Sesuai untuk material dengan Tuap < 1600 C
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APLIKASI THERMAL
EVAPORATIVE COATINGS
Application Purpose
Electronic components Manfufacturing procedure
Interference films on camera and microscope To reduce reflection and glare
lenses for decoration, absorption of solar energy, control
of heating, eg of satellite.
Coloured interference coatings Tinting, to reduce heat and glare
Transparent coatings, eg alumina, silica dioxide, To give abrasion resistance
on polycarbonate windows and eye-glasses
MCrA1Y coatings on gas turbine vanes and For increased resistance to sulphidation and oxidation
blades (M=Co, Ni or Fe)
Aluminium coating of steel strip For use in can manufacture
Nickel coating of perforated steel strip For use in alkaline batteryu manufacture
Coating of interior and exterior car trim For decoration
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THERMAL EVAPORATION SOURCE
Resistance heated
evaporation source Electron beam heated vacuum
Sesuai untuk material dengan Tuap < 1600 C evaporation source
Substrate Substrate
Vapor Vapor
stream (VACUUM) stream (VACUUM)
Source Boat
water
Focused Water-cooled crucible
electron
beam
H.T. supply +
-
Filament and High V>DC
shield Low A
Filament
Boat supply supply
Low V > AC Low V AC
High A High A 24
PROSES ACTIVATED REACTIVE EVAPORATION
(ARE PROCESS)
Pressure
Electron
barrier beam
evaporator
Vacuum pumps
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JENIS PROSES VS KECEPATAN PELAPISAN
Coating rates of refractory compounds by reactive and
activated reactive evaporation
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TEMPERATUR SUBSTRAT VS KECEPATAN DEPOSISI
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Temperatur Substrat Vs Struktur Lapisan
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PROSES SPUTTER COATING
Pressure 10-3 - 10-1 torr
Applied potential 500 V
Working
gas
_
Target
Potential: 0,5-5 kV
_
Coating rate: 0,5-5 m + _
Use of magnetron adapted +
with rf supply increases 10 cm or less Power
coating rate up tp 100 m Plasma
Supply
Substrate
Vacuum pumps
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PROSES ION PLATING DENGAN
CARA BIAS SPUTTERING
Cooled vacuum
chamber Window Hot enclosure
Vent
Resistance
Negative potential
heater
is applied to the
workpiece producing Cathode
ion bombardment to it (source)
Insulator
Substrate Cathode
- power
supply
Shield
Purifier
Pump Gas
Bias
+
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- Bias
KARAKTER LAPISAN DAN APLIKASI
HV Bulk
Coating Thicknes Load
m gf Hardnes
Optical SEM HV
Time, h 0 2 5 10 20
Wear
(m) Wear behavior of TiN coatings on cast iron substrate
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10
Uncoated
8
Cr
6 Plated
TiN sputtered
2
TiN ion plated
0 2 4 6 8 10 12 14 16 32
Time (h)
KARAKTER LAPISAN DAN APLIKASI
Coefficient Coefficient
of friction of friction
0.6 LEAD 0.6 GOLD
0.4 0.4
0.2 0.2
0 0
0 -1 1 10 100 0 -1 1 10 100
Film thickness (m) Film thickness (m)
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KARAKTER LAPISAN DAN APLIKASI
40
Unimplanted
30
En 40B steel
10-7 En 40B steel pin-on-disc
pin-on-disc
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Implanted
10-8 2x1017 N/cm2
50 KeV
10
10-9
0
0.1 1.0 10 1016 1017 1018
Load (kg) Dosis N/cm2 (50 keV)
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KARAKTER LAPISAN DAN APLIKASI
Plasma
Natural Reactive
gas gas
Substrate
Evaporator
Evaporated
Cooling material Vacuum
Material pump
Power Supply
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PROSES ION PLATING
Gauze shield
Glass jar
Specimen
(cathode) Metal shield
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Klasifikasi Thermal Spray Coating
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Urutan dan Karakteristik Proses
Machining
Berfungsi untuk mempersiapkan ketebalan
lapisan yang diperlukan
Cleaning
Membuang kotoran nyang melekat dipermukaan
Dapat diterapkan ke berbagai jenis material
seperti: gemuk, minyak, dan kotoran dengan alternatif beberapa bahan pelapis
Surface Roughening Bermacam bentuk komponen dapat dilapisi
Membuat grooving dengan kedalaman 0.5 mm tergantung kondisi spray gun
atau lebih agar pelekatan lapisan maksimum
Namun terdapat kelemahan seperti:
Bond Coat adanya porositas, dan ikatan difusi
Memperkuat daya lekat lapisan terhadap secara metalurgis hampir tidak ada,
substrat (precoating Mo, Ni-Al)
Preheating
Memanaskan substrat s/d 100-150 °C agar
proses pelekatan lapisan-substrat optimum
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Contoh Struktur Lapisan
Dikutip dari Thermal Spray Coating Applications in The Chemical Process Industries,
R.P. Krepski, 1993
Base Metal
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Bentuk Spraying Gun
(Sesuai Metoda Penyemmprotan)
Melted Particles
Unmelted Powder
Melted Particles
Atomising Gas
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Karakteristik Beberapa Jenis Thermal Spray Coating
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Perkembangan Thermal Spray Coating
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Conventional Combustion Spraying
It makes use of conventional oxy-fuel combustion to melt the feeds (powder or wire), and thus,
consequently producing liquid droplets that will be sprayed onto the surface of components being coated.
This conventional method commonly uses powder feeds due to simple, compact, and light weight
equipment handling. The flame spraying will both melt and direct the feeds to the substrate. This cause
such characteristics, compared to other methods, as:
• Low droplet velocity
• Inferior coating in terms of porosity bond strength.
• It is used only for general maintenance and applications.
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Conventional Combustion Spraying
Contoh Material Pelapis
Jenis serbuk,
Coating Nickel Base Alloy Nickel Aluminium Aluminium Bronze
Composition, % Al 5.5 Al 5 Cu 85
Mo 5 Ni 95 Al 15
Ni bal
Hardness, HV 140 120 95
Bond streng to grit blasted 35 (5000) 20 (3000) 14 (2000)
Steel, N/mm2 (psi)
Density, g/ml 7.2 7.2 6.5
Porosity % <2 2 <5
Maximum service temp. oC 800 800 230
Thickness, mm typical 2.5 None 2.5
Cost, £/kg 42 22 33
Special feature Expensive material but used on used mainly as a bond coat, Can Mixture of elemental powder
account of high bond strength be used as a single coating to give which react on spraying to
for reclamation work on difficult moderate wear resistance up to give good bond. Used mainly
geometries. 800oC. Poor corrosion resistance. As build upcoating on copper
Can be machined to fine finish alloys. Good machining
Moderate wear resistance. Characteristics.
Moderate wear resistance.
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D-Gun Process
(Combustion Process)
The process is essentially a combustion method but it makes use of spark plug to ignite gas mixtures
and thereby accelerating the particles speed impinging the substrate.
This method imrpoves the impinging velocity of droplets (800 m/sec) as compared to conventional combustion
Thus producing as low as ½ -1% porosity of the layers.
Gas mixture is ignited 4-9 times per sec.
The operation is remotely controlled from console Powder
Spark plug
3000 K
Applied for highly abrasive condition.
N2 Acetylene O2 distance 5-10 cm
Typical coating materials normally used for this method
are either oxides or carbide-metal cermets such as:
Designation LA2 LA1 LW IN40 LCIB
Composition % Al2O3 WC 91 WC 85 Cr3C2 (65) Ni-Cr (35)
Hardness VHN 1100 1300 1050 700
Bond strength N/mm2 70 140 140 140
Porosity % 2 ½ ½ 1
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Arc Wire Spraying and Plasma Spraying
(Electric)
Arc Wire Spraying
The process makes use of two wires continuously fed in to the gun. An electric arc is then struck
between the wires and thus producing melts which is then atomised by the the gas or air.
The deposition reate is very high (~12 kg/hr for stainless steel)
Mostly applied for coating by metals/alloys such: as steels and copper alloys, with thick coating
Plasma Spraying
This is similar to arc wire method which makes use of electric power to melt coating articles
(normally powder), but the H2 / N2 / Ar /He are added into the gun and ionised by electric discharge
to cause protective atmosphere and increased temperature of arc (H2 and N2 4000 – 8000 ºK,
Ar 15000 ºK , He 20000 ºK)
This method produces a coating layer that its characteristics (interfacial bonding, porosity,
and grain structure) between thermal spray and D-gun.
It can be applied to various materials of ferrous, non ferrous, and polymeric to be.coated with
Metals/oxide/carbide
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Jet-Kote Process
The process is categorised as high velocity combustion system which uses plasma system
to prevent oxidation effect to the melting particles.
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Effect of coating thickness on bond strength
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Effect of substrate preheat temperature on bond strength
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Pelumasan
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Klasifikasi Pelumas
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Pelumasan Cair
1. Thick film lubrication: the total separation of asperities by a lubricant is caused by a fluid
pressure film which has thickness many times larger than the size of the lubricant molecules.
Velocity
Inlet Exit
Velocity profile Velocity profile Velocity profiles
Relative pressure
Relative pressure
Inlet Exit Inlet Exit
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Sifat-sifat Oil Based Lubricant
Basic properties
Bulk modulus Filterability
Surface tension Compatibility
Thermal conductivity Seal
Electrical conductivity Paint
Heat capacity Flammability
Refractive index Rheology
Rheology Shear sterngth
Viscosity Pourability
Viscosity-pressure coefficient Permanent viscosity loss
Viscosity-temperature coefficient Tribology
Temporary viscosity loss Friction
Gravity Wear
Density Load carrying
pitting fatigue
Performance properties Solvency
Corrosion/rust Stability
Wettability Oxidative
Volatility Hydrolytic
Foaming/air release Thermal
Toxicity Detergency/dispersancy
Biodegradability
Miscibility 57
Thermal conductivity
Kategori Pelumas Berdasarkan API
Applied to engine service
S categories (gasoline engine) :
SE i.e. improved protection against oxidation, high temperature deposits, rust
and corrosion
SF i.e. additives against high and low-temperature deposits, wear, and corrosion.
Improved oxidation stability and anti wear over SE.
SG i.e. meets CC category requirements. Improved anti wear, cleanliness, and
antithickening over SF.
C categories (diesel engine) :
CC i.e. lightly supercharged diesel engines and certain heavy-duty gasoline engine.
Additives against high-and low temperature deposits, rust, and corrosion.
CD i.e. satisfies requirements of supercharged diesel engines, even with high-sulfur
fuels. Additives against high-temperature deposits, rust and corrosion.
CD-II i.e. Severe duty service of supercharged two stroke engines. Satisfies CD
requirement and a supercharged two-stroke multicylinder engine 58
Hubungan Koefisien friksi Terhadap Rasio
Kecepatan Luncur - Tekanan Nominal
Boundary
Lubrication Full fluid film lubrication
Coefficient of friction
Sommerfeld number = Z N / P
Z, Lubricant viscosity
N, Rotational speed bearing
P, Nominal pressure
Sommerfeld number
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Contoh Pelumasan Pada Bearing
Shaft dia. 50 mm
Surface fatigue could bearing life 104 hours
appear in this region
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Pelumasan Padat
Thin film composed of a single or multi solid constituents that has shear
strength much lower than surface to be protected. As the sliding occurs
the solid films will undergo plastic deformation or sometimes followed
by asperities melting to cause easy movement of two moving surfaces.
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Pilihan Material Untuk Aplikasi Keausan
Sliding Rolling
Unlub. Lub. Abra Unlub. Lub Three-body Fluid Drop Particle
Materials wear wear sion wear wear abrasion erosion erosion erosion
Structural alloys
-Surface treatments X X X X
-Hard surfacing X X X X X X
-Soft coatings X X X
Alloy steels X X X X X X
Tool steels X X X X X X
Stainless steels
-Precipitation hardened X X X
-Martensitic X X X X X X
Cast irons
-Graphitic X X X X X
-White X X X
High-temperature alloys
-Refractory materials X X X
-Superalloys X X X X
Copper –base alloys
-Bronze X X
-Beryllium copper X
Soft bearing alloys (babbitts X
Carbides X X X X X X X
Ceramics X X X X X X
Polymers
-Thermosets X
-Thermoplastics X X X
-Elastomers X X X X X
Carbons X
Lubricatings composites X X 62
Langkah Perancangan Surface Engineering
Untuk Komponen Dengan Aplikasi Tribologi
Define
application
Define
properties
required
Mechanical
design
Materials
selection
Engineer substrate
Engineer surface
Design
lubrication
Evaluate
Performance
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